Fin end spacer for preventing merger of raised active regions
View Patent ↗After formation of gate structures over semiconductor fins and prior to formation of raised active regions, a directional ion beam is employed to form a dielectric material portion on end walls of semiconductor fins that are perpendicular to the lengthwise direction of the semiconductor fins. The angle of the directional ion beam is selected to be with a vertical plane including the lengthwise direction of the semiconductor fins, thereby avoiding formation of the dielectric material portion on lengthwise sidewalls of the semiconductor fins. Selective epitaxy of semiconductor material is performed to grow raised active regions from sidewall surfaces of the semiconductor fins. Optionally, horizontal portions of the dielectric material portion may be removed prior to the selective epitaxy process. Further, the dielectric material portion may optionally be removed after the selective epitaxy process.
1. A semiconductor structure comprising:
a fin active region located within a semiconductor fin that is located on a substrate, wherein surfaces of said fin active region include a widthwise sidewall of said semiconductor fin and portions of a pair of lengthwise sidewalls of said semiconductor fin;
a dielectric material portion contacting said widthwise sidewall;
a shallow trench isolation layer laterally surrounding said semiconductor fin, and wherein a bottommost surface of said dielectric material portion is present on a portion, but not an entirety of, a topmost surface of said shallow trench isolation layer;
a raised active region including a pair of doped semiconductor material portions located on said portions of said pair of lengthwise sidewalls, wherein said raised active region further includes another doped semiconductor material portion in contact with a top surface of said fin active region; and
a contact level dielectric layer in physical contact with said dielectric material portion and said raised active region.
2. The semiconductor structure of claim 1 , further comprising a gate structure straddling said semiconductor fin, wherein said contact level dielectric layer is in physical contact with sidewalls of said gate structure.
3. The semiconductor structure of claim 1 , further comprising:
gate structure straddling said semiconductor fin; and
a pair of gate spacers contacting a sidewall of said gate structure and having a same composition as said dielectric material portion.
4. The semiconductor structure of claim 1 , wherein an entirety of said pair of lengthwise sidewalk of said semiconductor fin is in physical contact with a gate dielectric, said pair of gate spacers, or at least one raised active region including said raised active region.
5. The semiconductor structure of claim 1 , wherein said raised active region is epitaxially aligned with said underlying fin active region.
6. The semiconductor structure of claim 1 , wherein said raised active region has crystallographic facets.
7. The semiconductor structure of claim 1 , wherein said shallow trench isolation layer has a bottommost surface that directly contacts a portion of a topmost surface of said substrate.
8. The semiconductor structure of claim 1 , wherein said substrate is a semiconductor material.
9. The semiconductor structure of claim 7 , wherein said bottommost surface of said shallow trench isolation layer is coplanar with a bottommost surface of said semiconductor fin.
10. A semiconductor structure comprising:
a fin active region located within a semiconductor fin that is located on a substrate, wherein surfaces of said fin active region include a widthwise sidewall of said semiconductor fin and portions of a pair of lengthwise sidewalls of said semiconductor fin;
a dielectric material portion contacting said widthwise sidewall, wherein said dielectric material contacting said widthwise sidewall of said semiconductor fin has a topmost surface that is coplanar with a topmost surface of said semiconductor fin;
a shallow trench isolation layer laterally surrounding said semiconductor fin, and wherein a bottommost surface of said dielectric material portion is present on a portion, but not an entirety of, a topmost surface of said shallow trench isolation layer;
a raised active region including a pair of doped semiconductor material portions located on said portions of said pair of lengthwise sidewalls; and
a contact level dielectric layer in physical contact with said dielectric material portion and said raised active region.
11. The semiconductor structure of claim 10 , wherein said raised active region further includes another doped semiconductor material portion in contact with a top surface of said fin active region.