IP Library › Granted Patent US 9,196,586
Granted Patent B2
US 9,196,586 · App. 14/180,084 · Granted Nov 24, 2015

Semiconductor package including an embedded surface mount device and method of forming the same

Inventors: Hsien-Wei Chen (Hsin-Chu, TW); Ying-Ju Chen (Tuku Township, TW); Ming-Yen Chiu (Zhubei, TW); Der-Chyang Yeh (Hsin-Chu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L23/538H01L23/12H01L23/3107H01L24/17H01L24/81H01L2924/15153
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Quick Facts
Patent No.
US 9,196,586
App. No.
14/180,084
Granted
Nov 24, 2015
Kind
B2
Abstract

Embodiments of the present disclosure include semiconductor packages and methods of forming the same. An embodiment is a semiconductor package including a first package including one or more dies, and a package substrate bonded to a first side of the first package with by a first set of connectors. The semiconductor package further includes a surface mount device mounted to the first side of the first package, the surface mount device consisting essentially of one or more passive devices.

Claims (43)

1. A semiconductor package comprising:

a first package comprising one or more dies;

a package substrate bonded to a first side of the first package by a first set of connectors;

a surface mount device mounted to the first side of the first package, the surface mount device consisting essentially of one or more passive devices; and

a second package bonded to a second side of the first package by a second set of conductive connectors, the second side being opposite the first side, the second package comprising one or more dies.

2. The semiconductor package of claim 1 , wherein the first package further comprises an interconnect structure on the first side of the first package, the surface mount device being mounted in a recess in the interconnect structure.

3. The semiconductor package of claim 2 , wherein the recess has a depth from about 10 μm to about 30 μm.

4. The semiconductor package of claim 2 further comprising an encapsulant in the recess and surrounding a portion of the surface mount device.

5. The semiconductor package of claim 1 , wherein the surface mount device has two conductive connectors.

6. The semiconductor package of claim 1 , wherein the first package further comprises:

an electrical connector extending from a second side of the first package to the first side of the first package, the second side being opposite the first side, the electrical connector being spaced from the one or more dies of the first package; and

a molding material surrounding the one or more dies of the first package and the electrical connector of the first package.

7. The semiconductor package of claim 1 , wherein the one or more passive devices of the surface mount device are selected from a group consisting of a capacitor, a resistor, an inductor, or a combination thereof.

8. A semiconductor package comprising:

a first package comprising:

a first die having a first side and a second side, the second side being opposite the first side;

an interconnect structure over the first side of the first die, the interconnect structure comprising N number of metal layers and M number of passivation layers;

a surface mount device being mounted to one of the N metal layers in a first portion of the interconnect structure, the first portion having less than M number of passivation layers; and

a set of under bump metallizations (UBMs) coupled to the Nth metal layer of the interconnect structure of the first package, the Nth metal layer being the furthest metal layer from the first side of the first die;

a first set of conductive connectors coupled to the set of UBMs; and

a package substrate bonded to the first set of conductive connectors.

9. The semiconductor package of claim 8 , wherein the surface mount device is mounted to the Nth metal layer of the interconnect structure.

10. The semiconductor package of claim 8 , wherein the surface mount device is mounted to the first metal layer of the interconnect structure, the first metal layer being the nearest metal layer to the first side of the first die.

11. The semiconductor package of claim 8 , wherein the first portion of the interconnect structure has M−1 passivation layers.

12. The semiconductor package of claim 8 , wherein the first portion of the interconnect structure has one passivation layer.

13. The semiconductor package of claim 8 , wherein a sidewall of the surface mount device is separated from a sidewall of the Mth passivation layer by at least 10 μm.

14. The semiconductor package of claim 8 , wherein the surface mount device consists essentially of one or more passive devices.

15. The semiconductor package of claim 8 further comprising a second package comprising a second die, the second package being bonded to the second side of the first die by a second set of connectors.

16. A method comprising:

forming a first package comprising:

forming an interconnect structure over a first side of a first die;

recessing a portion of the interconnect structure, wherein recessing the portion of the interconnect structure further comprises removing at least one passivation layer from the portion of the interconnect structure; and

mounting a surface mount device in the recessed portion of the interconnect structure; and

bonding the interconnect structure of the first package to a package substrate using a first set of conductive connectors.

17. The method of claim 16 further comprising encapsulating the surface mount device in the recessed portion of the interconnect structure.

18. The method of claim 16 , wherein recessing the portion of the interconnect structure further comprises removing at least one metal layer from the portion of the interconnect structure.

19. The method of claim 16 , wherein the forming the first package further comprises:

forming an electrical connector over a carrier substrate;

attaching the first die to the carrier substrate, the electrical connector extending from a second side of the first die to the first side of the first die, the second side being opposite the first side, the electrical connector being spaced from the first die;

encapsulating the first die and the electrical connector with a molding compound, the interconnect structure being formed over the first die and the molding compound, the interconnect structure being coupled to the first die and the electrical connector; and

removing the first package from the carrier substrate.

20. The method of claim 16 further comprising:

bonding a second package to first side of the first package using a second set of conductive connectors, the package substrate being bonded to a second side of the first package.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 13, 2014
From: CHEN, HSIEN-WEI; CHEN, YING-JU; CHIU, MING-YEN; YEH, DER-CHYANG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 032214/0949 →
Continuity (1)
Related Publication 20150228580A1 · Aug 13, 2015