Method of manufacturing precise semiconductor contacts
View Patent ↗A first dielectric layer including a first opening is provided on a first surface of a semiconductor layer. A second dielectric layer is provided on top of the first dielectric layer in the first opening. A first portion of the second dielectric layer is then removed, such that a second portion of the second dielectric layer remains in the first opening. The first dielectric layer is then removed, leaving only the second portion of the second dielectric layer on the surface of the semiconductor layer. An epitaxial layer or a base dielectric layer is grown on the exposed portions of the first surface of the semiconductor layer not covered by the second portion of the second dielectric layer. The second portion of the second dielectric layer is then removed to define one or more contact windows, and a contact metal is deposited in the one or more contact windows.
1. A method comprising the steps of:
providing a first dielectric layer including a first opening on a first surface of a semiconductor layer, such that the first opening defines an exposed portion of the first surface of the semiconductor layer;
providing a second dielectric layer on a surface of the first dielectric layer opposite the semiconductor layer and in the first opening;
removing a first portion of the second dielectric layer, such that a second portion of the second dielectric layer remains in the first opening;
substantially removing the first dielectric layer;
growing an epitaxial layer on the exposed portion of the first surface of the semiconductor layer not covered by the second portion of the second dielectric layer; and
removing the second portion of the second dielectric layer to define one or more contact windows in the epitaxial insulating layer through which a portion of the first surface of the semiconductor layer is exposed.
2. The method of claim 1 further comprising the step of depositing a contact metal in the one or more contact windows to form one or more Schottky contacts.
3. The method of claim 2 wherein the one or more Schottky contacts are gate contacts for a transistor device.
4. The method of claim 3 further comprising the steps of:
providing a drain region in the first surface of the semiconductor layer adjacent to each gate contact; and
providing a source region in the first surface of the semiconductor layer adjacent to each gate contact and opposite the drain region.
5. The method of claim 3 wherein the transistor device is a high electron mobility transistor (HEMT).
6. The method of claim 3 wherein the transistor device is a metal semiconductor field effect transistor (MESFET).
7. The method of claim 1 wherein each of the one or more contact windows has a width less than about 0.02 μm.
8. The method of claim 1 wherein each of the one or more contact windows has a width less than about 0.01 μm.
9. The method of claim 1 wherein providing the first dielectric layer including the first opening on the first surface of the semiconductor layer comprises:
providing the semiconductor layer;
providing the first dielectric layer on the first surface of the semiconductor layer; and
patterning the first dielectric layer to form the first opening.
10. The method of claim 1 wherein the second portion of the second dielectric layer is located on sidewalls of the first opening.
11. The method of claim 1 wherein the semiconductor layer comprises one of gallium nitride (GaN) and silicon carbide (SiC).
12. A method comprising the steps of:
providing a first dielectric layer including a first opening on a first surface of a semiconductor layer, such that the first opening defines an exposed portion of the first surface of the semiconductor layer;
providing a second dielectric layer on the surface of the first dielectric layer opposite the semiconductor layer and in the first opening;
removing a first portion of the second dielectric layer, such that a second portion of the second dielectric layer remains in the first opening;
removing the first dielectric layer;
growing a base dielectric layer on the exposed portion of the first surface of the semiconductor layer not covered by the second portion of the second dielectric layer; and
removing the second portion of the second dielectric layer to define one or more contact windows in the base dielectric layer through which a portion of the first surface of the semiconductor layer is exposed.
13. The method of claim 12 further comprising the step of depositing a contact metal in the one or more contact windows to form one or more Schottky contacts.
14. The method of claim 13 wherein the one or more Schottky contacts are gate contacts for a transistor device.
15. The method of claim 14 further comprising the steps of:
providing a drain region in the first surface of the semiconductor layer adjacent to each gate contact; and
providing a source region in the first surface of the semiconductor layer adjacent to each gate contact and opposite the drain region.
16. The method of claim 14 wherein the transistor device is a high electron mobility transistor (HEMT).
17. The method of claim 14 wherein the transistor device is a metal-semiconductor field-effect transistor (MESFET).
18. The method of claim 12 wherein each of the one or more contact windows has a width less than about 0.02 μm.
19. The method of claim 12 wherein each of the one or more contact windows has a width less than about 0.01 μm.
20. The method of claim 12 wherein providing the first dielectric layer including the first opening on the first surface of the semiconductor layer comprises:
providing the semiconductor layer;
providing the first dielectric layer on the first surface of the semiconductor layer; and
patterning the first dielectric layer to form the first opening.
21. The method of claim 12 wherein the second portion of the second dielectric layer is located on sidewalls of the first opening.
22. The method of claim 12 wherein the semiconductor layer comprises one of gallium nitride (GaN) and silicon carbide (SiC).