Vertical access devices, semiconductor device structures, and related methods
A vertical access device comprises a semiconductive base comprising a first source/drain region, a semiconductive pillar extending vertically from the semiconductive base, and a gate electrode adjacent a sidewall of the semiconductive pillar. The semiconductive pillar comprises a channel region overlying the first source/drain region, and a second source/drain region overlying the channel region. An opposing sidewall of the semiconductive pillar is not adjacent the gate electrode or another gate electrode. Semiconductive device structures, methods of forming a vertical access device, and methods of forming a semiconductive structure are also described.
1. A vertical access device, comprising:
a semi conductive base comprising a first source/drain region;
a semi conductive pillar extending vertically from the semiconductive base, the semiconductor pillar exhibiting a substantially uniform width up to a height thereof and comprising: a channel region overlying the first source/drain region; and a second source/drain region overlying the channel region;
a gate dielectric material adjacent a substantially planar sidewall of the semiconductive pillar;
a gate electrode adjacent the gate dielectric material;
an isolation structure comprising a dielectric material adjacent another substantially planar sidewall of the semiconductive pillar opposing the substantially planar sidewall, the isolation structure not adjacent the gate electrode, not adjacent the gate dielectric material, and not adjacent any other gate electrode; and
a body contact underlying the isolation structure and comprising conductive material adjacent a lower portion of the another substantially planar sidewall of the semiconductive pillar.
2. The vertical access device of claim 1 , wherein the semiconductive base comprises:
a lower region comprising the first source/drain region; and
an upper region between the lower region and the semiconductive pillar, and comprising the same conductivity type as the channel region of the semiconductive pillar.
3. The vertical access device of claim 1 , wherein the gate electrode is vertically between a top of the first source/drain region and a bottom of the second source/drain region.
4. The vertical access device of claim 1 , wherein the first source/drain region and the second source/drain region exhibit N-type conductivity, and the channel region exhibits P-type conductivity.
5. A method of forming a vertical access device, comprising: forming a semiconductive base comprising a first source/drain region;
forming a first semiconductive pillar vertically extending from the semiconductive base; forming a first gate electrode over a first sidewall of the first semiconductive pillar; forming a second gate electrode over a second, opposing sidewall of the same first semiconductive pillar;
forming a pair of second semiconductive pillars from the first semiconductive pillar, one of the pair of second semiconductive pillars adjacent the first gate electrode, and another of the pair of second semiconductive pillars adjacent the second gate electrode; forming a second source/drain region in each of the pair of second semiconductive pillars after forming the pair of second semiconductive pillars, the second source/drain region vertically overlying the first source/drain region;
forming a conductive material in a lower portion of a trench between the pair of second semiconductive pillars; and
forming an isolation structure comprising a dielectric material over the conductive material and within the trench between the pair of second semiconductive pillars.
6. The method of claim 5 , further comprising forming a gate dielectric material on the first sidewall of the first semiconductive pillar and on the second, opposing sidewall of the first semiconductive pillar.
7. The method of claim 5 , wherein forming a semiconductive base comprises:
forming a lower region of the semiconductive base comprising the first source/drain region; and
forming an upper region of the semiconductive base having an opposite conductivity type than the lower region of the semiconductive base.
8. The method of claim 5 , wherein forming a pair of second semiconductive pillars from the first semiconductive pillar comprises removing a central portion of the first semiconductive pillar.
9. The method of claim 5 , further comprising forming an isolation structure between the pair of second semiconductive pillars.
10. A semiconductor device structure, comprising:
at least one semiconductive pillar vertically extending from a semiconductive base;
a first filled isolation trench located on a first side of the at least one semiconductive pillar;
a second filled isolation trench located on a second, opposite side of the at least one semiconductive pillar;
a gate dielectric material on side surfaces of the at least one semiconductive pillar within the first filled isolation trench;
a pair of gate electrodes on side surfaces of the gate dielectric material within the first filled isolation trench;
a first isolation structure overlying and between surfaces of the pair of gate electrodes and the gate dielectric material within the first filled isolation trench;
a second isolation structure on surfaces of the at least one semiconductive pillar within the second filled isolation trench; and
a conductive material within the second filled isolation trench and underlying the second isolation structure.
11. The semiconductor device structure of claim 10 , further comprising a void space within the second isolation structure.
12. The semiconductor device structure of claim 10 , wherein a width of the first filled isolation trench is greater than a width of the second filled isolation trench.
13. The semiconductor device structure of claim 10 , wherein the semiconductive base comprises a lower region exhibiting a first conductivity type, and an upper region exhibiting a second conductivity type.
14. The semiconductor device structure of claim 13 , wherein the at least one semiconductive pillar comprises a lower region exhibiting the second conductivity type, and an upper region exhibiting the first conductivity type.
15. The semiconductor device structure of claim 10 , further comprising:
another semiconductive pillar located on a side of the first filled isolation trench opposite the first side of the at least one semiconductive pillar; and
an additional semiconductive pillar located on a side of the second filled isolation trench opposite the second side of the at least one semiconductive pillar.
16. The semiconductor device structure of claim 15 , wherein the first side of the at least one semiconductive pillar is horizontally adjacent one of the pair of gate electrodes within the first filled isolation trench, and wherein a side of the another semiconductive pillar opposing the first side of the at least one semiconductive pillar is horizontally adjacent the other of the pair of gate electrodes within the first filled isolation trench.
17. A method of forming a semiconductor device structure, comprising:
forming first semiconductive pillars vertically extending from a semiconductive base and separated from one another by first isolation trenches;
forming gate electrodes over opposing sidewalls of the first semiconductive pillars exposed within the first isolation trenches;
forming first isolation structures over and between the gate electrodes within the first isolation trenches;
forming second isolation trenches in the first semiconductive pillars to form second semiconductive pillars, each of the second semiconductive pillars adjacent one of the gate electrodes;
forming body contacts comprising conductive material at bottoms of the second isolation trenches; and
forming second isolation structures in the second isolation trenches.
18. The method of claim 17 , wherein forming first isolation structures over and between the gate electrodes within the first isolation trenches comprises forming the first isolation structures to comprise lower portions contained within the first isolation trenches, and upper portions extending beyond vertical boundaries of the first isolation trenches and each having substantially the same width as each of the first isolation trenches.
19. The method of claim 18 , wherein forming second isolation trenches in the first semiconductive pillars comprises:
forming spacers on opposing sidewalls of the upper portions of the first isolation structures and over portions of upper surfaces of the first semiconductive pillars; and
at least partially removing regions of the first semiconductive pillars remaining uncovered by the spacers.
20. The method of claim 19 , further comprising removing the spacers and the upper portions of the first isolation structures after forming the second isolation trenches.
21. The method of claim 17 , wherein forming second isolation structures in the second isolation trenches comprises forming the second isolation structures on and between sidewalls of the second semiconductive pillars exposed within the second isolation trenches.
22. The method of claim 17 , further comprising forming void spaces within central regions of the second isolation structures.
23. A semiconductor device structure, comprising:
semiconductive pillars vertically extending from a semiconductive base and separated by filled isolation trenches;
a conductive material directly on an upper surface of the semiconductive base within the filled isolation trenches, the conductive material extending completely between and directly contacting portions of opposing sidewalls of the semiconductive pillars within the filled isolation trenches;
a dielectric material on an upper surface of the conductive material and other portions of the opposing sidewalls of the semiconductive pillars within the filled isolation trenches;
opposing gate electrodes on opposing side surfaces of the dielectric material within the filled isolation trenches; and
isolation structures over and between the opposing gate electrodes within the filled isolation trenches.