Semiconductor structures with bridging films and methods of fabrication
View Patent ↗Semiconductor structures and fabrication methods are provided having a bridging film which facilitates adherence of both an underlying layer of dielectric material and an overlying stress-inducing layer. The method includes, for instance, providing a layer of dielectric material, with at least one gate structure disposed therein, over a semiconductor substrate; providing a bridging film over the layer of dielectric material with the at least one gate structure; and providing a stress-inducing layer over the bridging film. The bridging film is selected to facilitate adherence of both the underlying layer of dielectric material and the overlying stress-inducing layer by, in part, forming a chemical bond with the layer of dielectric material, without forming a chemical bond with the stress-inducing layer.
1. A method comprising:
fabricating a semiconductor structure, the fabricating comprising:
providing a layer of dielectric material, with at least one gate structure disposed therein, over a semiconductor substrate;
providing a bridging film over the layer of dielectric material with the at least one gate structure disposed therein; and
providing a stress-inducing layer over the bridging film, wherein the bridging film is selected to facilitate adherence to both the underlying layer of dielectric material and the overlying stress-inducing layer by, in part, forming a chemical bond with the layer of dielectric material, without forming a chemical bond with the stress-inducing layer.
2. The method of claim 1 , wherein the layer of dielectric material comprises an uncured dielectric material which includes hydrogen-bonding groups disposed therein, and providing the bridging film comprises selecting the bridging film to facilitate hydrogen bonding of the bridging film to the uncured dielectric material.
3. The method of claim 2 , wherein the bridging film lacks hydrogen-bonding groups at an upper surface thereof, which facilitates the bridging film being chemically inert to the stress-inducing layer.
4. The method of claim 2 , wherein providing the stress-inducing layer comprises selecting the stress-inducing layer to facilitate adherence to the bridging film, without hydrogen bonding between the stress-inducing layer and the bridging film.
5. The method of claim 4 , wherein the stress-inducing layer comprises a nitride material and wherein the bridging film comprises a silicon-rich oxide material.
6. The method of claim 1 , wherein the layer of dielectric material comprises an uncured dielectric material which includes a first oxide material, and the bridging film comprises a second oxide material, the first oxide material and the second oxide material being different oxide materials, and the second oxide material being denser than the first oxide material.
7. The method of claim 6 , wherein the uncured dielectric material is a flowable oxide material, and the bridging film comprises a silicon-rich oxide material.
8. The method of claim 1 , wherein providing of the bridging film and providing of the stress-inducing layer occur within a common plasma chamber.
9. The method of claim 8 , wherein providing of the bridging film comprises employing a gaseous mixture within the common plasma chamber, the gaseous mixture comprising a silane precursor and at least one gaseous material.
10. The method of claim 9 , wherein the at least one gaseous material comprises a nitrous oxide gaseous material.
11. The method of claim 8 , wherein providing the stress-inducing layer comprises employing a gaseous mixture within the common plasma chamber, the gaseous mixture comprising a silane precursor and at least one gaseous material.
12. The method of claim 11 , wherein the at least one gaseous material comprises an ammonia gaseous material.
13. The method of claim 1 , wherein the stress-inducing layer is a compressive stress-inducing layer.
14. A structure comprising:
a semiconductor structure, the semiconductor structure comprising:
a layer of dielectric material, with at least one gate structure disposed therein, over a semiconductor substrate;
a bridging film over the layer of dielectric material, with the at least one gate structure disposed therein, the bridging film being chemically bonded to the layer of dielectric material; and
a stress-inducing layer over the bridging film, and adhered thereto absent chemical bonding thereof to the bridging film.
15. The structure of claim 14 , wherein the bridging film layer is hydrogen bonded to the layer of dielectric material.
16. The structure of claim 15 , wherein the bridging film lacks hydrogen-bonding groups at an upper surface thereof, which facilitates the bridging film being chemically inert to the stress-inducing layer.
17. The structure of claim 15 , wherein the stress-inducing layer comprises a nitride material.
18. The structure of claim 14 , wherein the layer of dielectric material comprises a first oxide material, and the bridging film comprises a second oxide material, the first oxide material and the second oxide material being different oxide materials, and the second oxide material being denser than the first oxide material.
19. The structure of claim 18 , wherein the bridging film comprises a silicon-rich oxide material.
20. The structure of claim 14 , wherein the stress-inducing layer comprises a compressive stress-inducing layer, which induces a compressive stress within at least a portion of the semiconductor substrate.