Deposit removal method
One embodiment of the deposit removal method includes: preparing a substrate having a pattern on which a deposit is deposited, the pattern being formed by etching; exposing the substrate to a first atmosphere containing hydrogen fluoride gas; exposing the substrate to oxygen plasma while heating after the step of exposing the substrate to the first atmosphere; and exposing the substrate to a second atmosphere containing hydrogen fluoride gas to remove the deposit on the substrate after the step of exposing the substrate to the oxygen plasma.
1. A deposit removal method, comprising:
preparing a substrate having a pattern on which a deposit is deposited, the pattern being formed by etching;
exposing the substrate to oxygen plasma while heating; and
exposing the substrate to a mixed gas of hydrogen fluoride gas and alcohol gas in a chamber while repeating a first period and a second period alternately after the step of exposing the substrate to the oxygen plasma,
wherein a first partial pressure of alcohol gas in the chamber in the first period enables removal of the deposit by the mixed gas, a second partial pressure of alcohol gas in the chamber in the second period being lower than the first partial pressure,
wherein the first and second periods are about 5 to 20 seconds, and
wherein the first and second partial pressures are adjusted by controlling a pumping rate while supplying the mixed gas at a fixed flow rate.
2. The deposit removal method according to claim 1 ,
wherein the deposit contains a silicon oxide and organic matter.
3. The deposit removal method according to claim 2 ,
wherein the organic matter in the deposit is formed when gas containing carbon is used in the etching for forming the pattern.
4. The deposit removal method according to claim 1 ,
wherein the pattern contains silicon dioxide as a structure.
5. The deposit removal method according to claim 1 ,
wherein a pressure in the chamber in the first period is 5 Torr to 7 Torr.
6. The deposit removal method according to claim 1 ,
wherein a pressure in the chamber in the second period is 1.3 Torr to 5 Torr.
7. The deposit removal method according to claim 1 ,
wherein a temperatures of the substrate in the first and second periods are 10° C. to 30° C.
8. The deposit removal method according to claim 1 , further comprising:
exposing the substrate to second oxygen plasma while heating after the step of exposing the substrate to the mixed gas.
9. The deposit removal method according to claim 8 , further comprising:
exposing the substrate to a second mixed gas of hydrogen fluoride gas and alcohol gas in the chamber while repeating a third period and a fourth period alternately after the step of exposing the substrate to the second oxygen plasma,
wherein a third partial pressure of alcohol gas in the chamber in the third period enabling removal of the deposit by the second mixed gas, a fourth partial pressure of alcohol gas in the chamber in the fourth period being lower than the third partial pressure,
wherein the third and fourth periods are about 5 to 20 seconds, and
wherein the third and fourth partial pressures are adjusted by controlling the pumping rate while supplying the second mixed gas at a fixed flow rate.
10. The deposit removal method according to claim 1 ,
wherein the controlling of the pumping rate is achieved by adjusting an opening degree of an automatic pressure controller.