Granted Patent B2

US 9,216,489 · App. 14/228,613 · Granted Dec 22, 2015

Abstract

Claims (35)

1. A chemical mechanical polishing pad, comprising:

a polishing layer having a polishing surface; and,

an endpoint detection window;

wherein the endpoint detection window comprises a reaction product of ingredients, comprising:

an isocyanate terminated urethane prepolymer having 2 to 6.5 wt % unreacted NCO groups; and,

a curative system, comprising:

at least 5 wt % of a difunctional curative;

at least 5 wt % of an amine initiated polyol curative having at least one nitrogen atom per molecule and an average of at least three hydroxyl groups per molecule; and,

25 to 90 wt % of a high molecular weight polyol curative having a number average molecular weight, M N , of 2,000 to 100,000 and an average of 3 to 10 hydroxyl groups per molecule.

2. The chemical mechanical polishing pad of claim 1 , wherein the polishing surface is adapted for polishing a substrate selected from the group consisting of at least one of a magnetic substrate, an optical substrate and a semiconductor substrate.

3. The chemical mechanical polishing pad of claim 2 , wherein the polishing surface has a spiral groove pattern formed therein.

4. The chemical mechanical polishing pad of claim 1 , wherein the curative system has a plurality of reactive hydrogen groups and the isocyanate terminated urethane prepolymer has a plurality of unreacted NCO groups; and, wherein a stoichiometric ratio of the reactive hydrogen groups to the unreacted NCO groups is 0.7 to 1.2.

5. The chemical mechanical polishing pad of claim 1 , wherein the endpoint detection window exhibits a density of ≧1 g/cm 3 ; a porosity of less than 0.1 vol %; a Shore D hardness of 10 to 50; an elongation to break of ≦400%; and, a double pass transmission at 800 nm, DPT 800 , of 30 to 100%.

6. The chemical mechanical polishing pad of claim 5 , wherein the endpoint detection window also exhibits a double pass transmission at 400 nm, DPT 400 , of 25 to 100%.

7. A method of making a chemical mechanical polishing pad according to claim 1 , comprising:

providing a polishing layer having a polishing surface;

providing an isocyanate terminated urethane prepolymer having 2 to 6.5 wt % unreacted NCO groups;

providing a curative system, comprising:

at least 5 wt % of a difunctional aromatic curative;

at least 5 wt % of an amine initiated polyol curative having at least one nitrogen atom per molecule and an average of at least three hydroxyl groups per molecule;

25 to 90 wt % of a high molecular weight polyol curative having a number average molecular weight, M N , of 2,000 to 100,000 and an average of 3 to 10 hydroxyl groups per molecule;

combining the isocyanate terminated urethane prepolymer and the curative system to form a combination;

allowing the combination to react to form a product;

forming an endpoint detection window from the product;

interfacing the endpoint detection window with the polishing layer to provide a chemical mechanical polishing pad.

8. The method of claim 7 , wherein the endpoint detection window is an integral window.

9. A method of polishing a substrate, comprising:

providing a chemical mechanical polishing apparatus having a platen, a light source and a photosensor;

providing at least one substrate;

providing a chemical mechanical polishing pad according to claim 1 ;

installing onto the platen the chemical mechanical polishing pad;

optionally, providing a polishing medium at an interface between the polishing surface and the substrate;

creating dynamic contact between the polishing surface and the substrate, wherein at least some material is removed from the substrate; and,

determining a polishing endpoint by transmitting light from the light source through the endpoint detection window and analyzing the light reflected off the surface of the substrate back through the endpoint detection window incident upon the photosensor.

10. The method of claim 9 , wherein the at least one substrate is selected from the group consisting of at least one of a magnetic substrate, an optical substrate and a semiconductor substrate.

Assignments (6)