Implant for performance enhancement of selected transistors in an integrated circuit
View Patent ↗A first implant is performed into a substrate to form a well in which a plurality of transistors will be formed. Each transistor of a first subset of the plurality of transistors to be formed has a width that satisfies a predetermined width constraint and each transistor of a second subset has a width that does not satisfy the constraint. A second implant is performed at locations in the well in which transistors of the first subset will be formed and not at locations in the well in which transistors of the second subset will be formed. The transistors are formed, wherein a channel region of each transistor of the first subset is formed in a portion of the substrate which received the second implant and a channel region of each transistor of the second subset is formed in a portion of the substrate which did not receive the second implant.
1. A semiconductor structure comprising:
a well; and
a plurality of transistors formed within the well, wherein:
each transistor of the plurality of transistors is of a same conductivity type, and
the plurality of transistors comprises:
a first subset of transistors, wherein each transistor in the first subset of transistors has a transistor width that does not satisfy a predetermined width constraint; and
a second subset of transistors, mutually exclusive with the first subset of transistors, wherein each transistor in the second subset of transistors has a transistor width that satisfies the predetermined width constraint, wherein each transistor in the second subset of transistors has a channel region which includes an additional dopant as compared to the channel regions of the first subset of transistors, and wherein the channel region of each transistor of the plurality of transistors has a dopant of a first conductivity type and the additional dopant in the channel region of each transistor of the second subset of transistors is of a second conductivity type opposite the first conductivity type.
2. The semiconductor structure of claim 1 , wherein the transistor width of each transistor in the second subset of transistors is less than a predetermined transistor width and the transistor width of each transistor in the first subset of transistors is not less than a predetermined transistor width.
3. The semiconductor structure of claim 1 , wherein each transistor of the first subset of the plurality of transistors has a first threshold voltage and each transistor of the second subset has a second threshold voltage greater than the first threshold voltage.
4. The semiconductor structure of claim 1 , wherein each transistor of the plurality of transistors has
a gate electrode,
a first source/drain region adjacent a first sidewall of the gate electrode, and
a second source/drain region adjacent a second sidewall of the gate electrode, wherein the channel region of each transistor of the plurality of transistors is located under the gate electrode of each transistor, between the first and second source/drain regions of each transistor.
5. The semiconductor structure of claim 4 , wherein a first transistor of the first subset of transistors is immediately adjacent a second transistor of the second subset of transistors, wherein the first transistor and the second transistor share a source/drain region.
6. The semiconductor structure of claim 1 , wherein a resultant dopant concentration of the channel regions of the transistors of the first subset of the plurality of transistors is less than a resultant dopant concentration of the channel regions of the transistors of the second subset of the plurality of transistors.
7. A semiconductor structure comprising:
a well; and
a plurality of transistors formed within the well, wherein:
each transistor of the plurality of transistors is of a same conductivity type, and
the plurality of transistors comprises:
a first subset of transistors, wherein each transistor in the first subset of transistors has a transistor width not less than a predetermined width; and
a second subset of transistors, mutually exclusive with the first subset of transistors, wherein each transistor in the second subset of transistors has a transistor width less than the predetermined width, wherein each transistor in the first subset of transistors has a channel region which comprises a first dopant, wherein each transistor in the second subset of transistors has a channel region which comprises a second dopant, wherein each transistor of the first subset of transistors has a first threshold voltage, wherein each transistor of the second subset of transistors has a second threshold voltage, and wherein the first threshold voltage is greater than the second threshold voltage.
8. The semiconductor structure of claim 7 , wherein the first dopant is of a first conductivity type and the second dopant is of a second conductivity type opposite the first conductivity type.
9. The semiconductor structure of claim 7 , wherein the channel region of each transistor of the plurality of transistors comprises the first dopant.
10. The semiconductor structure of claim 7 , wherein the transistor width of each transistor in the second subset of transistors satisfies a predetermined transistor width constraint and the transistor width of each transistor in the first subset of transistors does not satisfy a predetermined transistor width constraint.
11. The semiconductor structure of claim 7 , wherein the first dopant is of a first conductivity type and the second dopant is of a same conductivity type.
12. The semiconductor structure of claim 7 , wherein each transistor of the plurality of transistors has
a gate electrode,
a first source/drain region adjacent a first sidewall of the gate electrode, and
a second source/drain region adjacent a second sidewall of the gate electrode, wherein the channel region of each transistor of the plurality of transistors is located under the gate electrode of each transistor, between the first and second source/drain regions of each transistor.
13. The semiconductor structure of claim 12 , wherein a first transistor of the first subset of transistors is immediately adjacent a second transistor of the second subset of transistors, wherein the first transistor and the second transistor share a source/drain region.
14. The semiconductor structure of claim 7 , wherein a resultant dopant concentration of the channel regions of the transistors of the first subset of the plurality of transistors is less than a resultant dopant concentration of the channel regions of the transistors of the second subset of the plurality of transistors.
15. A semiconductor structure comprising:
a well; and
a plurality of transistors formed within the well, wherein:
each transistor of the plurality of transistors is of a same conductivity type, and
the plurality of transistors comprises:
a first subset of transistors, wherein each transistor in the first subset of transistors has a transistor width that does not satisfy a predetermined width constraint; and
a second subset of transistors, mutually exclusive with the first subset of transistors, wherein each transistor in the second subset of transistors has a transistor width that satisfies the predetermined width constraint, wherein each transistor in the second subset of transistors has a channel region which includes an additional dopant as compared to the channel regions of the first subset of transistors, and wherein the channel region of each transistor of the plurality of transistors has a dopant of a first conductivity type and the additional dopant in each channel region of each transistor of the second subset of transistors is of a same conductivity type.