Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
View Patent ↗A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X) n or (CoX) n composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.
1. A magnetic tunnel junction (MTJ), comprising:
(a) a seed layer formed on a substrate;
(b) a free layer comprising a laminated stack that contacts a top surface of the seed layer, the laminated layer has intrinsic perpendicular magnetic anisotropy (PMA) and comprises a (Co/X) n or (CoX) n structure wherein X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, and Si, CoX is a disordered alloy, and n is the number of laminates in the stack;
(c) a tunnel barrier layer formed on the free layer;
(d) a reference layer formed on the tunnel barrier layer; and
(e) and a capping layer formed on the reference layer.
2. The MTJ of claim 1 wherein the seed layer is Hf, NiFeCr, or NiCr, or a composite with a Hf/NiCr, Hf/NiFeCr, NiFeCr/Hf, or NiCr/Hf configuration and having a thickness between about 5 and 100 Angstroms.
3. The MTJ of claim 1 further comprised of a magnetic layer made of CoFeB, CoFe, or combinations thereof formed between the laminated stack and the tunnel barrier layer.
4. The MTJ of claim 1 wherein n is from 2 to 30.
5. The MTJ of claim 1 wherein each of the Co layers in the (Co/X) n structure has a thickness from about 1.5 to 4 Angstroms, and each of the plurality of X layers has a thickness from about 4 to 10 Angstroms.