Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
View Patent ↗A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X) n or (CoX) n′ composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.
1. A magnetic element, comprising:
(a) a seed layer comprising one or more of Hf, NiCr, and NiFeCr that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer; and
(b) a layer having intrinsic PMA and comprising pure Co or a laminated stack represented by (Fe/V) n where n is the number of laminates in the stack, and the Co or (Fe/V) n laminated stack contacts a top surface of the seed layer.
2. The magnetic element of claim 1 wherein the seed layer and Co layer or Fe/V) n laminated stack are formed in a magnetic tunnel junction (MTJ) having a seed layer/reference layer/tunnel barrier/free layer configuration, the Co layer or (Fe/V) n laminated stack is part of the reference layer.
3. The magnetic element of claim 2 wherein the reference layer further comprises a magnetic layer formed between the Co layer or (Fe/V) n laminated stack and the tunnel barrier to increase a magnetoresistive (MR) ratio in the MTJ, the magnetic layer interfaces with the tunnel barrier and has PMA with a magnetic moment in a same direction as the PMA in the Co layer or (Fe/V) n laminated stack.
4. The magnetic element of claim 1 wherein the seed layer and Co layer or (Fe/V) n laminated stack are formed in a MTJ having a reference layer/tunnel barrier/free layer/spacer/seed layer/dipole layer configuration and the Co layer or (Fe/V) n laminated stack is the dipole layer.
5. The magnetic element of claim 1 wherein the seed layer and the Co layer or (Fe/V) n laminated stack are formed in a MTJ having a seed layer/composite free layer/tunnel barrier/reference layer configuration and the Co layer or (Fe/V) n laminated stack is part of the composite free layer.
6. The magnetic element of claim 5 wherein the composite free layer further comprises a magnetic layer formed between the Co layer or (Fe/V) n laminated stack and the tunnel barrier to increase a magnetoresistive (MR) ratio in the MTJ, the magnetic layer interfaces with the tunnel barrier and has PMA with a magnetic moment in a same direction as the PMA in the Co layer or (Fe/V) n laminated stack.