Sensor package having stacked die
View Patent ↗A small area semiconductor device package containing two or more MEMS sensor device die and a controller die for the sensor devices is provided. The controller die is mounted on top of the largest MEMS sensor device die (e.g., a gyroscope) and over a second MEMS sensor device die (e.g., an accelerometer). In one embodiment, the controller die is also mounted on the top of the second MEMS sensor device die. In another embodiment, the controller die overhangs the second MEMS sensor device die, which is of a lesser thickness than the first MEMS sensor device die.
1. A semiconductor device package comprising:
a first semiconductor device die;
a second semiconductor device die;
a controller die, wherein
a first major surface of the controller die is mechanically coupled to an active major surface of the first semiconductor device die,
the first major surface of the controller die extends over an active major surface of the second semiconductor device die;
a first set of wire bonds coupling a first set of contact pads of the controller die to contact pads of the first semiconductor device die; and
a second set of wire bonds coupling a second set of contact pads of the controller die to contact pads of the second semiconductor device die.
2. The semiconductor device package of claim 1 further comprising:
encapsulant over, under, and around the first semiconductor device die, over, under, and around the second semiconductor device die, and over, under, and around the controller die, wherein the encapsulant forms an encapsulated region of the semiconductor device package.
3. The semiconductor device package of claim 2 , wherein
the first and second semiconductor device die are configured with side surfaces approximately in parallel, defining a gap region between the side surfaces, and
the encapsulant is formed in the gap region.
4. The semiconductor device package of claim 3 , wherein
the second semiconductor device die has a same thickness as the first semiconductor device die, and
the first major surface of the controller die is mechanically coupled to the active major surface of the second device die and forms a bridge over the gap region.
5. The semiconductor device package of claim 3 , wherein
the second semiconductor device die has a thickness less than the first semiconductor device die, and
the extent of the controller die over the second semiconductor device die forms a vertical space region between the first major surface of the controller die and the active major surface of the second semiconductor device die.
6. The semiconductor device package of claim 5 , wherein the encapsulant is formed in the vertical space region between the first major surface of the controller die and the active major surface of the second semiconductor device die.
7. The semiconductor device package of claim 1 wherein the first and second semiconductor device die each comprise a microelectromechanical systems (MEMS) device die that is a sensor device.
8. The semiconductor device package of claim 7 , wherein
the sensor device comprises one of a gyroscope, an accelerometer, or a magnetometer, and
the first and second semiconductor device die comprise distinct sensor device types from one another.
9. The semiconductor device package of claim 8 , wherein
the first and second semiconductor device die are configured such that operational axes of the associated sensor devices of the first and second semiconductor device die are in a known relationship to one another.
10. The semiconductor device package of claim 1 further comprising:
one or more leads provided by a lead frame; and
a third set of wire bonds coupling a third set of contact pads of the controller die to corresponding leads of the one or more leads.
11. A method for packaging an electronic device assembly, the method comprising:
providing a carrier;
placing a lead frame on the carrier in an area that comprises an area for the electronic device assembly;
placing a first semiconductor device die on a portion of the lead frame in the area for the electronic device assembly;
placing a second semiconductor device die on another portion of the lead frame in the area for the electronic device assembly, wherein the second semiconductor device die is configured with a side surface substantially in parallel with a side surface of the first semiconductor device die, defining a gap region between the side surfaces;
mechanically coupling a first major surface of a controller die to an active major surface of the first semiconductor device die, wherein the first major surface of the controller die extends over an active major surface of the second semiconductor device die; and
forming a first set of wire bonds coupling a first set of contact pads of the controller die to contact pads of the second semiconductor device die.
12. The method of claim 11 further comprising:
forming an encapsulant over, under, and around the first semiconductor device die, over, under, and around the second semiconductor device die, and over, under, and around the controller die.
13. The method of claim 12 further comprising:
forming the encapsulant in the gap region.
14. The method of claim 13 further comprising:
mechanically coupling the first major surface of the controller die to the active major surface of the second semiconductor device die, wherein
the second semiconductor device die has a same thickness as the first semiconductor device die, and
the controller die forms a bridge between the first and second semiconductor device die over the gap region.
15. The method of claim 13 further comprising:
forming encapsulant in a vertical space region between the first major surface of the controller die and the active major surface of the second semiconductor device die, wherein
the second semiconductor device die has a thickness less than the first semiconductor device die, and
the extent of the controller die over the second semiconductor device die forms the vertical space region.
16. The method of claim 11 wherein the first and second semiconductor device die each comprise a microelectromechanical systems (MEMS) device that is a sensor device.
17. The method of claim 16 , wherein
the sensor device comprises one of a gyroscope, an accelerometer, or a magnetometer, and
the first and second semiconductor device die comprise distinct sensor device types from one another.
18. The method of claim 17 further comprising:
orienting the operational axes of the associated sensor devices of the first and second semiconductor device die in a known relationship to one another.
19. The method of claim 11 , wherein the lead frame has one or more leads, and the method further comprises:
coupling a third set of contact pads of the controller die to corresponding leads of the one or more leads, using corresponding wire bonds.
20. The method of claim 19 , wherein said forming said wire bonds comprises forming wire bonds from one or more of copper and gold.