IP Library Granted Patent US 9,064,718
Granted Patent B1
US 9,064,718 · App. 14/271,469 · Granted Jun 23, 2015

Pre-formed via array for integrated circuit package

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Quick Facts
Patent No.
US 9,064,718
App. No.
14/271,469
Granted
Jun 23, 2015
Kind
B1
Abstract

A method for assembling a 3D integrated circuit package that includes a base device and a top device. The method includes bonding (i) a pre-formed via array having a via rack and via elements and (ii) a base die to the substrate of the base device. The resulting sub-assembly is encapsulated in molding compound, and the via rack and any corresponding molding compound are removed, such as by grinding, to generate a base device with vias corresponding to the via elements and exposed bond posts on its top surface corresponding to the tops of the vias. A pre-packaged or unpackaged top device is then attached and bonded to the base device and, if necessary, encapsulated to form the 3D package with the exposed tops of the vias providing electrical connections between the base substrate and the top device.

Claims (50)

1. A method for assembling an integrated circuit (IC) package, the method comprising:

(a) bonding a via array to a base substrate, wherein:

the via array comprises a plurality of via elements that project from a via rack;

the via elements are electrical conductors held together by the via rack;

each via element comprises a via; and

bottoms of the via elements are bonded to corresponding through-mold bond pads on a top surface of the base substrate;

(b) encapsulating the via array and the top surface of the base substrate in molding compound, wherein at least a portion of each via element is encapsulated; and

(c) removing the via rack to form a packaged base device having a top surface and comprising the base substrate, the vias, and the molding compound, wherein the top surface of the packaged base device comprises top sides of the vias and a top side of the molding compound.

2. The method of claim 1 , wherein:

each via element further comprises a top portion located above the via;

step (c) further comprises removing the top portions of the via elements and leaving the vias.

3. The method of claim 1 , wherein:

step (c) further comprises removing a top portion of the molding compound; and

the top side of the molding compound is a top side of the post-removing-step molding compound.

4. The method of claim 1 , step (a) further comprises:

attaching a base IC die to the base substrate; and

electrically connecting the base die to corresponding bond pads on the base substrate, wherein step (b) further comprises encapsulating the base die.

5. The method of claim 4 , wherein:

the base substrate has a bottom surface opposite from the top surface;

the base substrate comprises first and second sets of pad connectors adapted to electrically connect the package to another component;

each pad connector of the first set is conductively connected to a corresponding through-mold bond post; and

each pad connector of the second set is conductively connected to a corresponding base-die bond post.

6. The method of claim 1 , wherein:

the via rack is a planar rectangular ring;

the via rack has a central rectangular opening; and

the via rack holds the via elements in place.

7. The method of claim 6 , wherein the via elements are parallel to each other along their longitudinal axes and perpendicular to the plane of the rack.

8. The method of claim 6 , wherein the via rack is an open planar rectangular ring having a gap.

9. The method of claim 1 , wherein the via array is preformed as a single unitary metal piece.

10. The method of claim 1 , wherein:

each via element has a bottom;

prior to step (a), the bottoms of the via elements are coated with a finishing material.

11. The method of claim 10 , wherein the finishing material comprises at least one of nickel, silver, gold, and solder.

12. The method of claim 1 , wherein step (a) comprises one of thermo-compression bonding and ultrasonic bonding.

13. The method of claim 12 , wherein step (a) comprises using at least one of a solder and an anisotropic conductive film between the via elements and the corresponding through-mold bond posts.

14. The method of claim 1 , wherein step (c) comprises grinding away the via rack.

15. The method of claim 14 , wherein:

step (b) includes encapsulating the via rack in the molding compound; and

step (c) further comprises grinding away the top of the molding compound.

16. The method of claim 1 , wherein:

the IC package is a three-dimensional (3D) package;

the method further comprises assembling a top device comprising a top die on top of the packaged base device; and

electrically connecting the top die to the top sides of the vias of the base device.

17. The method of claim 16 , wherein:

the top device is pre-packaged prior to assembly on top of the base device; and

the resulting 3D package is a package-on-package (POP) type package.

18. The method of claim 17 , wherein the assembly of the top device on top of the base device comprises:

attaching an unpackaged top die to the top of the base device;

forming conductive paths from the top die to the via top sides of the base device; and

forming encapsulant around the conductive paths and the top die, wherein the resulting 3D package is a chip-scale-package (CSP) type package.

Assignments (17)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040632 FRAME: 0001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Sep 21, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 044209/0047 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 040632/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 14/258,829 AND REPLACE ITWITH 14/258,629 PREVIOUSLY RECORDED ON REEL 037444 FRAME 0082. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OFSECURITY INTEREST IN PATENTS. Recorded Aug 10, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039639/0332 →
CORRECTIVE ASSIGNMENT OF INCORRECT APPLICATION 14/258,829 PREVIOUSLY RECORDED ON REEL 037444 FRAME 0109. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Aug 10, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039639/0208 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 5, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037444/0082 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 5, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037444/0109 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0903 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Aug 1, 2014
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 033462/0293 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Aug 1, 2014
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 033462/0267 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Aug 1, 2014
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 033460/0337 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2014
From: MUNIANDY, KESVAKUMAR V.C.; KALANDAR, NAVAS KHAN ORATTI
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 032835/0239 →