Method of fabrication of an array of graded refractive index microlenses integrated in an image sensor
View Patent ↗Methods and devices that incorporate microlens arrays are disclosed. An image sensor includes a pixel layer and a dielectric layer. The pixel layer has a photodetector portion configured to convert light absorbed by the pixel layer into an electrical signal. The dielectric layer is formed on a surface of the pixel layer. The dielectric layer has a refractive index that varies along a length of the dielectric layer. A method for fabricating an image sensor includes forming an array of microlenses on a surface of the dielectric layer, emitting ions through the array of microlenses to implant the ions in the dielectric layer, and removing the array of microlenses from the surface of the dielectric layer.
1. A method for fabricating an image sensor, the image sensor comprising a pixel layer and a dielectric layer, the method comprising the steps of:
forming an array of microlenses on a surface of the dielectric layer wherein the ions are aligned with photodetectors in the pixel layer;
emitting ions through the array of microlenses to implant the ions in the dielectric layer; and
removing the array of microlenses from the surface of the dielectric layer.
2. The method of claim 1 , wherein the forming step comprises:
forming an array of polymer microlenses.
3. The method of claim 1 , wherein the forming step comprises:
forming the array of microlenses such that points of minimum thickness of the array are centered above respective photodetector portions of the pixel layer.
4. The method of claim 1 , wherein the forming step comprises:
forming the array of microlenses such that points of maximum thickness of the array are centered above respective photodetector portions of the pixel layer.
5. The method of claim 1 , wherein the emitting step comprises:
emitting the ions in a direction normal to the surface of the dielectric layer.
6. The method of claim 1 , wherein the emitting step comprises:
emitting the ions in a direction oblique to the surface of the dielectric layer.
7. The method of claim 1 , wherein the emitting step comprises:
emitting ions with an energy of approximately 30 keV.
8. The method of claim 1 , wherein the dielectric layer comprises silicon nitride and the emitting step comprises emitting argon ions.