Granted Patent B2

US 9,219,107 · App. 14/288,268 · Granted Dec 22, 2015

Abstract

Claims (12)

1. A method of forming a semiconductor device structure using a semiconductor substrate having a first conductivity type and a top surface, comprising:

performing a patterned implant to form a plurality of first doped regions at a first depth below the top surface arranged in a checkerboard fashion, wherein the plurality of first doped regions are of a second conductivity type, opposite the first conductivity type, and wherein the plurality of first doped regions define a plurality of first regions in the substrate at the first depth, whereby the plurality of first regions in the substrate are in a checkerboard pattern in which each first region of the plurality of first regions is between adjacent first doped regions of the plurality of first doped regions;

performing a patterned implant above the first doped regions to form a plurality of second doped regions, wherein the plurality of second doped regions are of the second conductivity type and are above and directly on the plurality of first regions in the substrate;

forming a dielectric layer over the top surface; and

forming an inductive element over the dielectric layer, wherein the inductive element is over the first doped regions.

2. The method of claim 1 , further comprising:

counterdoping the substrate to increase a resistance of a portion of the substrate.

3. The method of claim 2 , wherein the counterdoping changes the portion of the substrate from P− to P−−−, wherein the performing the patterned implant is applied to the portion of the substrate, wherein the portion includes where the first doped regions are formed.

4. The method of claim 2 , further comprising:

wherein the second doped regions define second regions in the substrate.

5. The method of claim 4 , further comprising forming dielectric regions in the substrate over and aligned to the second doped regions.

6. The method of claim 4 , further comprising forming dielectric regions in the substrate over and aligned to the second regions in the substrate.

Assignments (25)