Imaging devices for molecule detection
View Patent ↗An imager may include an array of pixels formed on a substrate. A chemisorption layer such as a planar chemisorption layer may be deposited over the array of pixels. The chemisorption layer may include active sites that bond with anchoring molecules. The anchoring molecules may be bonded to the planar chemisorption layer in only localized regions each covering a respective pixel of the array of pixels. The image sensor may include a photoresist layer that covers the chemisorption layer. Openings in the photoresist layer may define the boundaries of the localized regions. The anchoring molecules may be bonded only with the chemisorption layer without bonding to the photoresist layer. The anchoring molecules may serve to bond with analyte molecules. By forming the anchoring molecules within only localized regions centered over respective pixels, spatial resolution of the imager when imaging the analyte molecules may be improved.
1. An imager, comprising:
a substrate;
an array of pixels on the substrate;
a planar chemisorption layer over the array of pixels;
anchoring molecules that are bonded to the planar chemisorption layer in only localized regions each covering a respective pixel of the array of pixels; and
a photoresist layer that covers the planar chemisorption layer and is formed separately from the planar chemisorption layer, wherein openings in the photoresist layer define the localized regions.
2. The imager defined in claim 1 wherein the planar chemisorption layer comprises a polymer having active sites that chemically bond with the anchoring molecules.
3. The imager defined in claim 2 wherein the anchoring molecules are bonded only to the planar chemisorption layer.
4. The imager defined in claim 2 wherein the photoresist layer comprises a material that is chemically stable during alkaline conditions.
5. The imager defined in claim 4 wherein the photoresist layer comprises a polymer.
6. The imager defined in claim 5 wherein the active sites of the polymer comprise hydroxyl groups.
7. The imager defined in claim 5 wherein the planar chemisorption layer comprises a polymer having functional groups that bond with the anchoring molecules, wherein the functional groups are selected from the group consisting of: benzyl halides, alkyl halides, alkoxide, olefin, dienyl, thiol, amino, amido, and ester groups.
8. The imager defined in claim 1 further comprising:
a color filter layer interposed between the array of pixels and the planar chemisorption layer.
9. A method, comprising:
fabricating a pixel array on a substrate;
depositing a chemisorption layer having bonding sites;
after depositing the chemisorption layer, depositing a photoresist layer over the chemisorption layer, wherein depositing the photoresist layer comprises depositing a continuous photoresist layer across the entire pixel array;
after depositing the photoresist layer, patterning the photoresist layer using photolithography to remove portions of the photoresist layer, wherein remaining portions of the photoresist layer after patterning define localized openings in the photoresist layer over underlying pixels of the pixel array, wherein the openings do not include material of the photoresist layer, and wherein the localized openings in the photoresist layer expose the chemisorption layer; and
depositing anchoring molecules that bond with the bonding sites of the chemisorption layer in the localized openings of the photoresist layer.
10. The method defined in claim 9 wherein depositing the chemisorption layer having bonding sites comprises depositing a polymer layer having hydroxyl groups.
11. The method defined in claim 10 wherein depositing the anchoring molecules comprises depositing anchoring molecules having silicon oxide groups that chemically bond with the hydroxyl groups of the chemisorption layer.
12. The method defined in claim 9 wherein depositing the chemisorption layer comprises depositing a layer of silicon oxide having surface hydroxyl groups.
13. An imager, comprising:
a substrate;
an array of pixels on the substrate;
a planar chemisorption layer over the array of pixels, wherein the planar chemisorption layer covers the entire array of pixels;
anchoring molecules that are bonded to the planar chemisorption layer in only localized regions each covering a respective pixel of the array of pixels; and
a photoresist layer that covers the planar chemisorption layer and is formed separately from the planar chemisorption layer, wherein the anchoring molecules are not bonded to the photoresist layer, wherein the photoresist layer has portions that define openings in which no material from the photoresist layer is formed, and wherein the openings define the localized regions.
14. The imager defined in claim 13 wherein the planar chemisorption layer comprises a polymer having active sites that chemically bond with the anchoring molecules.