Apparatus and method for placing stressors on interconnects within an integrated circuit device to manage electromigration failures
View Patent ↗A method for selecting locations within an integrated circuit device for placing stressors to manage electromigration failures includes calculating an electric current for an interconnect within the integrated circuit device and determining an electromigration stress profile for the interconnect based on the electric current. The method further includes determining an area on the interconnect for placing a stressor to alter the electromigration stress profile for the interconnect.
1. A method for selecting locations within an integrated circuit device for placing stressors to manage electromigration failures, the method comprising:
calculating an electric current for a first interconnect within the integrated circuit device;
determining an electromigration stress profile for the first interconnect based on the electric current; and
determining an area on the first interconnect for placing a stressor to alter the electromigration stress profile for the first interconnect.
2. The method of claim 1 , wherein the determining the area comprises determining an area within a threshold distance of a via that is in electrical contact with the first interconnect.
3. The method of claim 1 , wherein the determining the area comprises selecting the area in order to oppose a stress gradient identified by the electromigration stress profile for the first interconnect.
4. The method of claim 1 , wherein the calculating the electric current comprises determining a direction of the electric current.
5. The method of claim 4 , wherein the calculating the electric current further comprises determining the direction of the electric current across a barrier layer that prevents metal migration between the first interconnect and a second interconnect in electrical contact with the first interconnect.
6. The method of claim 4 , wherein the determining the area for placing the stressor further comprises determining, based on the direction of the electric current calculated for the first interconnect, a local anode or a local cathode for the first interconnect.
7. The method of claim 6 , wherein the area for placing the stressor is determined as being at one of:
the local anode to alter the electromigration stress profile for the first interconnect by altering a stress at the area to be less compressive;
the local cathode to alter the electromigration stress profile for the first interconnect by altering a stress at the area to be less tensile.
8. The method of claim 1 , wherein the determining the electromigration stress profile based on the electric current calculated for the first interconnect comprises determining the electromigration stress profile based on an electric current density calculated for the first interconnect.
9. The method of claim 1 , wherein the determining the electromigration stress profile based on the electric current calculated for the first interconnect comprises determining the electromigration stress profile based on a time-averaged electric current for the first interconnect.