Stiffened semiconductor die package
View Patent ↗A stiffened semiconductor die package has a semiconductor die including an integrated circuit. The die has an active side with die bonding pads and an opposite inactive side. A conductive frame that acts as a ground plane surrounds all edges of the die and a mold compound covers the conductive frame and the edges of the die. A thermally conductive sheet is attached to the inactive side of the die. A dielectric support structure with external connector pads with solder deposits is attached to the active side of the die. The external connector pads are selectively electrically coupled to the die bonding pads.
1. A method of manufacturing stiffened semiconductor die packages, the method comprising:
providing an assembly structure having a temporary support with a sheet of interconnected ground plane conductive frames mounted thereto, wherein each of the conductive frames defines a die enclosure;
placing semiconductor dies into respective ones of the die enclosures, wherein the semiconductor dies include integrated circuits, and wherein each semiconductor die has an active side with die bonding pads placed adjacent the temporary support and an inactive side opposite the active side;
encapsulating the conductive frames and semiconductor dies with a mold compound;
removing part of the mold compound from the semiconductor dies to expose the inactive sides of the semiconductor dies;
attaching a thermally conductive sheet to the inactive sides of the semiconductor dies;
replacing the temporary support with a dielectric support structure that has external connector pads selectively electrically coupled to the die bonding pads; and
separating the conductive frames from each other to thereby provide the stiffened semiconductor die packages.
2. The method of manufacturing stiffened semiconductor die packages of claim 1 , wherein the removing is performed by grinding.
3. The method of manufacturing stiffened semiconductor die packages of claim 2 , wherein the grinding removes a layer of the inactive side of the semiconductor die.
4. The method of manufacturing stiffened semiconductor die packages of claim 1 , wherein the mold compound is a single mold covering the sheet of interconnected conductive frames.
5. The method of manufacturing stiffened semiconductor die packages of claim 4 , wherein the separating includes separating both the single mold and the conductive sheet.
6. The method of manufacturing stiffened semiconductor die packages of claim 1 , wherein at least one of the external connector pads is also electrically coupled to the conductive frame.
7. The method of manufacturing stiffened semiconductor die packages of claim 1 , further comprising selectively mounting solder deposits to the external connector pads to form a grid array structure, wherein the selectively mounting is performed before the separating process.
8. The method of manufacturing stiffened semiconductor die packages of claim 1 , wherein the thermally conductive sheet has slots therein and surfaces of the slots define outer edges of a respective one of the stiffened semiconductor die packages.
9. The method of manufacturing stiffened semiconductor die packages of claim 8 , wherein the sheet of interconnected ground plane conductive frames has slots therein and surfaces of the slots define outer edges of the semiconductor die packages.
10. The method of manufacturing stiffened semiconductor die packages of claim 9 , wherein the separating the ground plane conductive frames from each other is characterized by the separating being performed along the slots in the thermally conductive sheet and the slots in the ground plane conductive frames.
11. The method of manufacturing stiffened semiconductor die packages of claim 1 , wherein the removing causes the inactive surface of the semiconductor die to be coplanar with an aligned surface of the mold compound and the attaching also attaches the thermally conductive sheet to the aligned surface of the mold compound.