FinFET device formation
View Patent ↗A method includes patterning a fin on a semiconductor substrate, depositing a local trench isolation (LTI) layer on the semiconductor substrate, patterning a gate stack over a channel region of the fin and over a portion of the LTI layer, depositing a first capping layer over exposed portions of the LTI layer, performing an etching process to remove oxide material from exposed portions of the fin, and epitaxially growing a semiconductor material from exposed portions of the fin to define active regions.
1. A device comprising:
a semiconductor substrate;
a semiconductor fin arranged on the substrate;
a local trench isolation (LTI) layer disposed on the substrate;
a gate stack disposed over a channel region of the fin and a portion of the LTI layer;
a first capping layer disposed on a portion of the LTI layer; and
an epitaxially grown semiconductor material arranged on the fin and the first capping layer, the epitaxially grown semiconductor material partially defining active regions of the device.
2. The device of claim 1 , wherein a thickness of the first capping layer defines a gap defined by a surface of the first capping layer in contact with the active regions and a bottom surface of the gate stack.
3. The device of claim 1 , wherein a bottom of the gate stack is spaced a first distance defined orthogonally from the substrate to the bottom of the gate stack, and a bottom of the active regions is spaced a second distance defined orthogonally from the substrate to the bottom of the active regions, wherein the first distance is less than the second distance.
4. The device of claim 1 , wherein the LTI layer includes an oxide material.
5. The device of claim 1 , wherein the first capping layer includes a nitride material.
6. The device of claim 1 , further comprising a second capping layer disposed on the active regions of the device, wherein the second capping layer includes a nitride material.
7. The device of claim 1 , further comprising spacers arranged adjacent to the gate stack.
8. The device of claim 1 , wherein the first capping layer has a first thickness in regions of the first capping layer that are disposed above and in contact with the LTI layer and a second thickness in regions of the first capping layer that are disposed on sidewalls of the fin, wherein the first thickness is greater than the second thickness.