Solid-state image pickup device
A solid-state image pickup device 1 according to the present invention includes a semiconductor substrate 2 on which a pixel 20 composed of a photodiode 3 and a transistor is formed. The transistor comprising the pixel 20 is formed on the surface of the semiconductor substrate, a pn junction portion formed between high concentration regions of the photodiode 3 is provided within the semiconductor substrate 2 and a part of the pn junction portion of the photodiode 3 is extended to a lower portion of the transistor formed on the surface of the semiconductor substrate 2 . According to the present invention, there is provided a solid-state image pickup device in which a pixel size can be microminiaturized without lowering a saturated electric charge amount (Qs) and sensitivity.
1. A solid-state image pickup device comprising:
a semiconductor region of a first conductivity-type between a channel portion of the first conductivity-type and a photodiode region of a second conductivity-type, said channel portion and said photodiode region touching said semiconductor region;
a gate insulating film between a gate electrode and said channel portion, said semiconductor region touching said photodiode region and said gate insulating film;
a first isolation region extending from a front surface of a semiconductor substrate to a back side surface of the semiconductor substrate, said photodiode region and said semiconductor region touching said first isolation region;
a second isolation region extending from said front surface to said back side surface, said photodiode region and said semiconductor region touching said second isolation region,
wherein said photodiode region is between said first isolation region and said second isolation region, said photodiode region being between said semiconductor region and said back side surface.
2. The solid-state image pickup device according to claim 1 , wherein an impurity of the first conductivity-type is in said first isolation region.
3. The solid-state image pickup device according to claim 2 , wherein a dopant of the first conductivity-type is in said second isolation region.
4. The solid-state image pickup device according to claim 1 , wherein said first conductivity is of a conductivity opposite to said second conductivity.
5. The solid-state image pickup device according to claim 1 , wherein said first conductivity is p-type.
6. The solid-state image pickup device according to claim 1 , wherein said second conductivity is n-type.
7. The solid-state image pickup device according to claim 1 , further comprising:
a floating diffusion region between said front surface and said channel portion, said channel portion touching said semiconductor region and said floating diffusion region.
8. The solid-state image pickup device according to claim 7 , wherein said floating diffusion region is of said second conductivity-type.
9. The solid-state image pickup device according to claim 7 , wherein said gate insulating film is between said gate electrode and said floating diffusion region.
10. The solid-state image pickup device according to claim 7 , wherein said gate electrode is between said floating diffusion region and a pixel separation region, said pixel separation region being an insulator.
11. The solid-state image pickup device according to claim 7 , wherein said first isolation region is between said floating diffusion region and a source-drain region.
12. The solid-state image pickup device according to claim 11 , wherein said source-drain region is of said first conductivity-type.
13. The solid-state image pickup device according to claim 1 , further comprising:
a back side layer of the first conductivity-type at said back side surface, said photodiode region being between said semiconductor region and said back side layer.
14. The solid-state image pickup device according to claim 13 , wherein said photodiode touches said back side layer.
15. The solid-state image pickup device according to claim 1 , further comprising:
a groove extending into said semiconductor substrate from said front surface to said semiconductor region, said gate insulating film lining said groove.
16. The solid-state image pickup device according to claim 15 , wherein said gate electrode is within said groove.
17. The solid-state image pickup device according to claim 15 , wherein said gate electrode said protrudes from within said groove to beyond said front surface.
18. The solid-state image pickup device according to claim 1 , wherein said gate insulating film touches said gate electrode.
19. The solid-state image pickup device according to claim 1 , wherein said gate insulating film touches said channel portion.
20. The solid-state image pickup device according to claim 1 , wherein said semiconductor region touches said channel portion.
21. The solid-state image pickup device according to claim 1 , wherein said gate insulating film between said gate electrode and said semiconductor region.