Field focusing features in a ReRAM cell
View Patent ↗A resistive random access memory (ReRAM) cell comprising a first conductive electrode and a dielectric storage material layer over the first conductive electrode. The dielectric storage material layer is conducive to the formation of conductive filaments during the application of a filament forming voltage to the cell. The cell includes a second conductive electrode over the dielectric storage material layer and a layer of conductive nanoclusters ( 911, 1211 ) including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive electrode or the second conductive electrode.
1. A method for forming a resistive random access memory (ReRAM) cell, comprising:
forming a first conductive layer;
forming a dielectric storage material layer over the first conductive layer, the dielectric storage material layer conducive to the formation of conductive filaments during an application of a filament forming voltage to the ReRAM cell;
forming a second conductive layer over the dielectric storage material layer;
forming a layer of conductive nanoclusters including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive layer or the second conductive layer, wherein the ReRAM cell includes a first plurality of the conductive nanoclusters of the layer of conductive nanoclusters;
wherein the forming a layer of conductive nanoclusters includes forming the layer of conductive nanoclusters by process wherein conductive nanoclusters of the plurality of nanoclusters nucleate and grow;
wherein the first plurality of conductive nanoclusters of the layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.
2. The method of claim 1 , wherein the forming the dielectric storage material layer is further characterized in that the dielectric storage material layer comprises a metal oxide.
3. A method for forming a resistive random access memory (ReRAM) cell, comprising:
forming a first conductive layer;
forming a dielectric storage material layer over the first conductive layer, the dielectric storage material layer conducive to the formation of conductive filaments during an application of a filament forming voltage to the ReRAM cell;
forming a second conductive layer over the dielectric storage material layer;
forming a layer of conductive nanoclusters including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive layer or the second conductive layer, wherein the ReRAM cell includes a first plurality of the conductive nanoclusters of the layer of conductive nanoclusters;
wherein the layer of conductive nanoclusters is formed on the dielectric storage material layer, the method further comprising:
forming a layer of dielectric material over the layer of conductive nanoclusters;
planarizing the layer of dielectric material to expose the a portion of the conductive nanoclusters of the layer of conductive nanoclusters;
forming the second conductive layer on the exposed top portions of the conductive nanoclusters of the layer of conductive nanoclusters.
4. The method of claim 3 , wherein prior to the forming the dielectric material, the method further comprises:
forming a plurality of openings in the dielectric storage material layer using the layer of conductive nanoclusters as a mask, wherein the forming the layer of dielectric material is performed such that the layer of dielectric material is formed within the plurality of openings.
5. The method of claim 1 , wherein the forming the layer of conductive nanoclusters is further characterized in that the average size of the conductive nanoclusters of the layer of conductive nanoclusters is 50 nanometers or less.
6. The method of claim 1 , wherein the forming the layer of conductive nanoclusters is further characterized in that the layer of conductive nanoclusters has a coverage density in the range of 30-50%.
7. The method of claim 3 , wherein first plurality of conductive nanoclusters of the layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.
8. The method of claim 1 wherein the layer of conductive nanoclusters is formed on the first conductive layer and the layer of dielectric storage material is formed over the layer of nanoclusters.
9. The method of claim 1 wherein the dielectric storage material layer includes portions that surround the conductive nanoclusters of the layer of conductive nanoclusters.
10. The method of claim 1 , wherein the layer of conductive nanoclusters is formed on the dielectric storage material layer.
11. A method for forming a resistive random access memory (ReRAM) cell, comprising:
forming a first conductive layer;
forming a dielectric storage material layer over the first conductive layer, the dielectric storage material layer conducive to the formation of conductive filaments during an application of a filament forming voltage to the ReRAM cell;
forming a second conductive layer over the dielectric storage material layer;
forming a layer of conductive nanoclusters including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive layer or the second conductive layer, wherein the ReRAM cell includes a first plurality of the conductive nanoclusters of the layer of conductive nanoclusters;
wherein the forming the layer of conductive nanoclusters includes forming a layer of metal and then annealing the layer of metal where the metal is agglomerated into the plurality of conductive nanoclusters.
12. A method for forming a resistive random access memory (ReRAM) cell, comprising:
forming a first conductive layer;
forming a dielectric storage material layer over the first conductive layer, the dielectric storage material layer conducive to the formation of conductive filaments during an application of a filament forming voltage to the ReRAM cell;
forming a second conductive layer over the dielectric storage material layer;
forming a layer of conductive nanoclusters including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive layer or the second conductive layer, wherein the ReRAM cell includes a first plurality of the conductive nanoclusters of the layer of conductive nanoclusters;
wherein the layer of conductive nanoclusters is formed on the first conductive layer and the layer of dielectric storage material is formed over the layer of nanoclusters:
further comprising forming a second layer of conductive nanoclusters on the dielectric storage material layer, the second layer of conductive nanoclusters including a second plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the second conductive layer, wherein the ReRAM cell includes a third plurality of the conductive nanoclusters of the second layer of conductive nanoclusters.
13. The method of claim 12 , wherein the first plurality of conductive nanoclusters of the layer of conductive nanoclusters and the third plurality of conductive nanoclusters of the second layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.
14. The method of claim 1 wherein the forming a layer of conductive nanoclusters includes forming the layer of conductive nanoclusters by a chemical vapor deposition process wherein conductive nanoclusters of the plurality of nanoclusters nucleate and grow.
15. The method of claim 12 , wherein first plurality of conductive nanoclusters of the layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.
16. The method of claim 10 , wherein first plurality of conductive nanoclusters of the layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.
17. The method of claim 3 , wherein the forming a layer of conductive nanoclusters includes forming the layer of conductive nanoclusters by process wherein conductive nanoclusters of the plurality of nanoclusters nucleate and grow.
18. The method of claim 11 , wherein the first plurality of conductive nanoclusters of the layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.