On-chip capacitors with a variable capacitance for a radiofrequency integrated circuit
View Patent ↗Methods of fabricating an on-chip capacitor with a variable capacitance, as well as methods of adjusting the capacitance of an on-chip capacitor and design structures for an on-chip capacitor. The method includes forming first and second ports configured to be powered with opposite polarities, first and second electrodes, and first and second voltage-controlled units. The method includes configuring the first voltage-controlled unit to selectively couple the first electrode with the first port, and the second voltage-controlled unit to selectively couple the second electrode with the second port. When the first electrode is coupled by the first voltage-controlled unit with the first port and the second electrode is coupled by the second voltage-controlled unit with the second port, the capacitance of the on-chip capacitor increases.
1. A method for tuning an on-chip capacitor during operation of an integrated circuit electrically coupled with the on-chip capacitor, the method comprising:
powering first and second ports of the on-chip capacitor with opposite polarities;
selectively opening and closing a first current path coupling a first electrode with the first port using a first voltage signal supplied from a first voltage-controlled unit of the integrated circuit, wherein the first electrode has an end separated from the first port by a first gap so that the first port and the end of the first electrode lack direct physical connection to electrically isolate the first electrode from the first port; and
selectively opening and closing a second current path coupling a second electrode with the second port using a second voltage signal supplied from a second voltage-controlled unit of the integrated circuit, wherein the second electrode has an end separated from the second port by a second gap so that the second port and the end of the second electrode lack direct physical connection to electrically isolate the second electrode from the second port,
wherein the first and second electrodes have a parallel arrangement in a space between the first and second ports and aligned transverse to the first and second ports, and the on-chip capacitor has a larger capacitance value when the first electrode is coupled by the first voltage-controlled unit with the first port and the second electrode is coupled by the second voltage-controlled unit with the second port than when the first and second electrodes are electrically isolated from the first and second ports.
2. The method of claim 1 where the first and second voltage-controlled units are operated concurrently by a single control bit effective to supply the first and second voltage signals.
3. The method of claim 1 further comprising: continuously powering a plurality of electrodes directly connected with the first and second ports to supply a fixed capacitance so that the selective connection of the first and second electrodes adjusts the fixed capacitance.