Component in the form of a wafer level package and method for manufacturing same
A vertically integrated hybrid component is implemented in the form of a wafer level package including: at least two element substrates assembled one above the other; a molded upper sealing layer made of an electrically insulating casting; and an external electrical contacting of the component being implemented on the top side via at least one contact stamp which is embedded in the sealing layer so that (i) its lower end is connected to a wiring level of an element substrate and (ii) its upper end is exposed in the surface of the sealing layer.
1. A component in the form of a wafer level package, comprising:
at least two element substrates wire-bonded one above the other;
a molded upper sealing layer of an electrically insulating casting compound; and
at least one contact stamp via which an external electrical contacting of the component on a top side of the component is implemented, the at least one contact stamp being embedded in the molded upper sealing layer such that (i) a lower end of the at least one contact stamp is connected to a wiring level of one of the element substrates and (ii) an upper end of the at least one contact stamp is exposed on a surface of the molded upper sealing layer,
wherein at least one multi-level rewiring for the at least one contact stamp is provided on the molded upper sealing layer,
wherein the at least one contact stamp is connected to a wiring level on the molded upper sealing layer, and wherein at least one terminal pad is formed in the multi-level rewiring on the molded upper sealing layer for an external electrical connection of the component,
wherein at least one individual chip is assembled in the wafer level package, and wherein the at least one individual chip is at least partially embedded in the electrically insulating casting compound of the molded upper sealing layer and is electronically connected to sensor circuitry of one of the element substrates by a via therethrough.
2. The component as recited in claim 1 , wherein the at least one contact stamp contains at least one of Al, Cu, Au and Ag.
3. The component as recited in claim 1 , wherein at least one electrical connection in the form of a wire bond connection is implemented between active element front sides of the two element substrates, and wherein the wire bond connection is completely embedded in the molded upper sealing layer.