IP Library Granted Patent US 9,640,260
Granted Patent B2
US 9,640,260 · App. 14/320,174 · Granted May 2, 2017

Memory devices with a connecting region having a band gap lower than a band gap of a body region

Inventors: Haitao Liu (Boise, ID); Jian Li (Boise, ID); Chandra Mouli (Boise, ID)
Assignee: Micron Technology, Inc.
G11C16/0483G11C16/10H01L27/1158H01L27/11582H01L29/7926
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Quick Facts
Patent No.
US 9,640,260
App. No.
14/320,174
Granted
May 2, 2017
Kind
B2
Abstract

Memory devices are shown that include a body region and a connecting region that is formed from a semiconductor with a lower band gap than the body region. Connecting region configurations can provide increased gate induced drain leakage during an erase operation. Configurations shown can provide a reliable bias to a body region for memory operations such as erasing, and containment of charge in the body region during a boost operation.

Claims (43)

1. An apparatus, comprising:

a body comprising a semiconductor having a first band gap;

a source coupled to a first end of the body, and a drain coupled to a second end of the body;

a plurality of gates along a length of the body, each of the plurality of gates being separated from the body by at least a respective charge storage structure;

a connecting region comprising a semiconductor having a second band gap, the second band gap being lower than the first band gap, the connecting region forming a direct interface with both the drain and the body; and

a drain select gate adjacent to the body and the connecting region.

2. The memory device of claim 1 , wherein the body region is oriented vertically.

3. The memory device of claim 1 , wherein the body region is oriented horizontally.

4. The memory device of claim 1 , wherein the body region forms a “U” shape with upward facing ends.

5. The memory device of claim 1 , wherein the body region comprises doped silicon.

6. The memory device of claim 5 , wherein the body region comprises p type silicon.

7. The memory device of claim 1 , wherein the connecting region comprises a semiconductor chosen from group consisting of germanium, gallium antimonide, indium nitride, indium arsenide, lead sulfide, lead selenide, lead telluirde, and silicon germanium.

8. The memory device of claim 1 , wherein the connecting region is directly coupled to the drain region and wherein the connecting region is directly coupled to the body region.

9. The memory device of claim 1 , wherein the body region comprises silicon and the connecting region comprises silicon germanium.

10. The memory device of claim 9 , wherein the silicon germanium region comprises epitaxial silicon germanium.

11. The memory device of claim 10 , wherein the epitaxial silicon germanium is Si x Ge 1-x where x is approximately 0.5.

12. An apparatus, comprising:

a memory cell string including:

a body comprising a semiconductor having a first band gap, the body having a first upward facing end and a second upward facing end;

a drain coupled to the first upward facing end;

a source coupled to the second upward facing end;

a plurality of gates along a length of the body;

a connecting region comprising a semiconductor having a second band gap, the second band gap being lower than the first band gap, the connecting region forming a direct interface with both the drain and the body;

a drain select gate adjacent to the body and the connecting region; and

a data line coupled to the drain region.

13. The memory device of claim 12 , wherein the connecting region comprises silicon germanium.

14. The memory device of claim 12 , wherein the connecting region comprises Si x Ge 1-x where x is approximately 0.5.

15. The memory device of claim 12 , wherein the connecting region comprises epitaxial Si x Ge 1-x .

16. The memory device of claim 12 , wherein the body region comprises p-doped silicon.

17. The memory device of claim 12 , wherein the memory cell string is substantially U shaped.

18. The memory device of claim 12 , wherein each of the gates is shared with an adjacent memory cell string.

19. The memory device of claim 12 , wherein each of the gates substantially surrounds a respective cross section of the body region.

20. The memory device of claim 12 , wherein a first portion of the gates are shared with a first adjacent memory cell string and wherein a second portion of the gates are shared with a second adjacent memory cell string.

21. An apparatus, comprising:

a body comprising a semiconductor having a first band gap;

a source coupled to a first end of the body, and a drain coupled to a second end of the body;

a plurality of gates along a length of the body, each of the plurality of gates being separated from the body by at least a respective charge storage structure;

a connecting region comprising a semiconductor having a second band gap, the second band gap being lower than the first band gap, the connecting region forming a direct interface with both the source and the body; and

a source select gate adjacent to the body and the connecting region.

22. The apparatus of claim 21 , wherein the apparatus comprises a system including a memory device that includes a string comprising the body, the source, the plurality of gates, the connecting region and the source select gate.

23. The apparatus of claim 21 , wherein the body region is oriented vertically.

24. The apparatus of claim 21 , wherein the body region is folded.

25. The apparatus of claim 21 , wherein the body region is substantially U shaped.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 3, 2014
From: LIU, HAITAO; LI, JIAN; MOULI, CHANDRA
To: MICRON TECHNOLOGY, INC.
Reel/Frame 034092/0126 →
Continuity (3)
Continuation 13872762 · Apr 29, 2013
Continuation 13020337 · Feb 3, 2011
Related Publication 20140313833A1 · Oct 23, 2014