FinFET devices having recessed liner materials to define different fin heights
View Patent ↗One method includes performing an etching process through a patterned mask layer to form trenches in a substrate that defines first and second fins, forming liner material adjacent the first fin to a first thickness, forming liner material adjacent the second fin to a second thickness different from the first thickness, forming insulating material in the trenches adjacent the liner materials and above the mask layer, performing a process operation to remove portions of the layer of insulating material and to expose portions of the liner materials, performing another etching process to remove portions of the liner materials and the mask layer to expose the first fin to a first height and the second fin to a second height different from the first height, performing another etching process to define a reduced-thickness layer of insulating material, and forming a gate structure around a portion of the first and second fin.
1. A FinFET device, comprising;
a plurality of trenches formed in a semiconducting substrate that define at least a first fin and a second fin;
a first local isolation region positioned in a bottom of each of a plurality of trenches that define said first fin, said first local isolation defining a first height of the first fin, said first isolation region comprising a first generally U-shaped liner material having a plurality of spaced apart generally upstanding legs that define, in part, a first cavity, said legs of said first generally U-shaped liner material having a first thickness;
a second local isolation region positioned in a bottom of each of a plurality of trenches that define said second fin, said second local isolation region defining a second fin height, wherein said first and second heights are different, said second local isolation region comprising a second generally U-shaped liner material having a plurality of spaced apart generally upstanding vertically oriented legs that define, in part, a second cavity, said legs of said second generally U-shaped liner material having a second thickness that is different than said first thickness;
a layer of insulating material positioned at least partially in said first and second cavities; and
a gate structure positioned around a portion of said first and second fins.
2. The device of claim 1 , wherein said semiconducting substrate is comprised of silicon.
3. The device of claim 1 , wherein said layer of insulating material is positioned entirely within one of said cavities.
4. The device of claim 1 , wherein said gate structure is comprised of a silicon dioxide gate insulation layer and a polysilicon gate electrode positioned above said gate insulation layer.
5. The device of claim 1 , wherein said gate structure is comprised of a gate insulation layer comprised of a high-k insulating material and a gate electrode comprised of at least one layer of metal.
6. The device of claim 1 , wherein said trenches have at least one of substantially vertical sidewalls, sloped sidewalls or curved sidewalls.
7. The device of claim 1 , wherein said first thickness is greater than said second thickness and said first height is greater than said second height.
8. The device of claim 1 , wherein said first thickness is less than said second thickness and said first height is less than said second height.
9. The device of claim 1 , wherein said liner material positioned adjacent said first fin comprises multiple layers of liner material, said liner material positioned adjacent said second fin comprises a single layer of liner material, said first thickness is greater than said second thickness and said first height is greater than said second height.
10. The device of claim 1 , wherein said liner material positioned adjacent said first fin comprises a single layer of liner material, said liner material positioned adjacent said second fin comprises a single layer of liner material, said first thickness is greater than said second thickness and said first height is greater than said second height.
11. A FinFET device, comprising;
a plurality of trenches formed in a semiconducting substrate that define at least a first fin and a second fin;
a first local isolation region positioned in a bottom of each of a plurality of trenches that define said first fin, said first local isolation region defining a first height of said first fin, said first local isolation region comprising a first generally U-shaped liner layer having a plurality of spaced apart generally upstanding legs that define, in part, a first cavity, each of said legs of said first generally U-shaped liner layer having a first thickness;
a second local isolation region positioned in a bottom of each of a plurality of trenches that define said second fin, said second local isolation region defining a second fin height that is greater than said first fin height, said second local isolation region comprising a second generally U-shaped liner layer positioned on said first generally U-shaped liner layer, said second generally U-shaped liner layer having a plurality of spaced apart generally upstanding oriented legs that define, in part, a second cavity, wherein a combined thickness of the legs of said first and second generally U-shaped liner layers is greater than said first thickness;
a layer of insulating material positioned at least partially in said first and second cavities; and
a gate structure positioned around a portion of said first and second fins.
12. The device of claim 11 , wherein said semiconducting substrate is comprised of silicon.
13. The device of claim 11 , wherein said layer of insulating material is positioned entirely within one of said cavities.
14. The device of claim 11 , wherein said gate structure is comprised of a silicon dioxide gate insulation layer and a polysilicon gate electrode positioned above said gate insulation layer.
15. The device of claim 11 , wherein said gate structure is comprised of a gate insulation layer comprised of a high-k insulating material and a gate electrode comprised of at least one layer of metal.
16. The device of claim 11 , wherein said trenches have at least one of substantially vertical sidewalls, sloped sidewalls or curved sidewalls.
17. The device of claim 11 , wherein said first generally U-shaped liner layer and said second generally U-shaped liner layer are made of the same material.