Sputtering target for magnetic recording medium, and process for producing same
View Patent ↗A sputtering target for a magnetic recording medium, wherein an average grain area of a B-rich phase is 90 μm 2 or less. A process for producing a sputtering target for a magnetic recording medium, wherein an alloy cast ingot is subject to heat treatment, thereafter subject to primary rolling which includes at least one pass of cold rolling, thereafter subject to secondary rolling, and machined to prepare a target. The obtained sputtering target for a magnetic recording medium has few cracks in the B-rich phase and has a high leakage flux density, and by using this target, it is possible to stabilize the discharge during sputtering, suppress arcing which occurs from cracks in the B-rich phase, and suppress the generation of particles.
1. A sputtering target for magnetic recording medium obtained by rolling a Co—Cr—B-based ingot, wherein an average grain area of B-rich phase is 90 μm 2 or less, and wherein the sputtering target consists of 1 to 40 at % of Cr, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
2. The sputtering target for a magnetic recording medium according to claim 1 , wherein a number of cracks in the B-rich phase is 2500 cracks/mm 2 or less.
3. The sputtering target for a magnetic recording medium according to claim 2 , wherein the sputtering target has a maximum magnetic permeability (μmax) of 50 or less.
4. A process for producing a sputtering target for a magnetic recording medium, wherein a Co—Pt—B-based alloy cast ingot is subject to heat treatment, thereafter subject to hot rolling and cold rolling at a total rolling reduction of 10 to 90%, which includes at least one pass of cold rolling, to cause an average grain area of a B-rich phase to be 90 μm 2 or less, and thereafter machined to prepare a target, wherein the sputtering target consists of 1 to 26 at % of Pt, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
5. A process for producing a sputtering target for a magnetic recording medium, comprising the steps of:
subjecting a Co—Pt—B-based alloy cast ingot to heat treatment;
after the heat treatment, subjecting the ingot to primary rolling including hot rolling and cold rolling at a total rolling reduction of 10 to 90% which includes at least one pass of cold rolling;
after the primary rolling, subjecting the ingot to secondary rolling including cold rolling at a total rolling reduction of 1.0 to 10% to cause an average grain area of a B-rich phase to be 90 μm 2 or less; and
after secondary rolling, machining the ingot to produce a sputtering target;
wherein the sputtering target consists of 1 to 26 at % of Pt, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
6. The process for producing a sputtering target for a magnetic recording medium according to claim 5 , wherein an initial rolling of the primary rolling is hot rolling.
7. A process for producing a sputtering target for a magnetic recording medium, wherein a Co—Cr—Pt—B-based alloy cast ingot is subject to heat treatment, thereafter subject to hot rolling and cold rolling at a total rolling reduction of 10 to 90%, which includes at least one pass of cold rolling, to cause an average grain area of a B-rich phase to be 90 μm 2 or less, and thereafter machined to prepare a target, wherein the sputtering target consists of 1 to 40 at % of Cr, 1 to 26 at % of Pt, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
8. A process for producing a sputtering target for a magnetic recording medium, wherein a Co—Cr—B-based alloy cast ingot is subject to heat treatment, thereafter subject to hot rolling and cold rolling at a total rolling reduction of 10 to 90%, which includes at least one pass of cold rolling, to cause an average grain area of a B-rich phase to be 90 μm 2 or less, and thereafter machined to prepare a target, wherein the sputtering target consists of 1 to 40 at % of Cr, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
9. A process for producing a sputtering target for a magnetic recording medium, comprising the steps of:
subjecting a Co—Cr—Pt—B-based alloy cast ingot to heat treatment;
after the heat treatment, subjecting the ingot to primary rolling including hot rolling and cold rolling at a total rolling reduction of 10 to 90% which includes at least one pass of cold rolling;
after the primary rolling, subjecting the ingot to secondary rolling including cold rolling at a total rolling reduction of 1.0 to 10% to cause an average grain area of a B-rich phase to be 90 μm 2 or less; and
after secondary rolling, machining the ingot to produce a sputtering target;
wherein the sputtering target consists of 1 to 40 at % of Cr, 1 to 26 at % of Pt, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
10. The process for producing a sputtering target for a magnetic recording medium according to claim 9 , wherein an initial rolling of the primary rolling is hot rolling.
11. A process for producing a sputtering target for a magnetic recording medium, comprising the steps of:
subjecting a Co—Cr—B-based alloy cast ingot to heat treatment;
after the heat treatment, subjecting the ingot to primary rolling including hot rolling and cold rolling at a total rolling reduction of 10 to 90% which includes at least one pass of cold rolling;
after the primary rolling, subjecting the ingot to secondary rolling including cold rolling at a total rolling reduction of 1.0 to 10% to cause an average grain area of a B-rich phase to be 90 μm 2 or less; and
after secondary rolling, machining the ingot to produce a sputtering target;
wherein the sputtering target consists of 1 to 40 at % of Cr, 1 to 15 at % of B, 0 at % or 1 to 10 at % of one or more elements selected from Cu, Ru, and Nd, and remainder being Co.
12. The process for producing a sputtering target for a magnetic recording medium according to claim 11 , wherein an initial rolling of the primary rolling is hot rolling.