Method for bonding polymer film and polymer film, method for bonding polymer film and inorganic material substrate, polymer film laminate, and laminate of polymer film and inorganic material substrate

1. A method of bonding a polymer film, comprising steps of:

forming a first inorganic material layer over part or all of a first polymer film;

forming a second inorganic material layer over part or all of a second polymer film;

surface-activating a surface of the first inorganic material layer by bombardment with particles having a predetermined kinetic energy;

surface-activating a surface of the second inorganic material layer by bombardment with particles having a predetermined kinetic energy; and

bringing a surface of the surface-activated first inorganic material layer and a surface of the surface-activated second inorganic material layer into contact to bond the first polymer film and the second polymer film,

wherein the first inorganic material layer and the second inorganic material layer are formed using silicon (Si) as a main component, and comprise iron.

2. The method of bonding a polymer film according to claim 1 , wherein the first inorganic material layer formed on the first polymer film and the second inorganic material layer formed on the second polymer film are each formed by sputtering.

3. The method of bonding a polymer film according to claim 1 , wherein the first polymer film and the second polymer film are formed using a polyimide resin or a polyester resin chosen from the group consisting of polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polybutylene terephthalate (PBT) and polytrimethylene terephthalate (PTT) as a main component.

4. The method of bonding a polymer film according to claim 1 , wherein the first polymer film and the second polymer film are formed of different materials.

5. The method of bonding a polymer film according to claim 1 , wherein the first inorganic material layer and the second inorganic material layer consist of layers of a plurality of materials.

6. The method of bonding a polymer film according to claim 1 , wherein the surface-activating step is performed by bombarding the surfaces of the first inorganic material layer and the second inorganic material layer with argon (Ar) particles having a kinetic energy of 0.1 keV to 2 keV.

7. The method of bonding a polymer film according to claim 1 , further comprising steps of:

heating the first polymer film to a temperature no greater than a melting point or no greater than a pyrolysis temperature of the first polymer film, before forming said first inorganic material layer; and

heating the second polymer film to a temperature no greater than a melting point or no greater than a pyrolysis temperature of the second polymer film, before forming said second inorganic material layer.

8. The method of bonding a polymer film according to claim 1 , wherein a pressure of at least 5 MPa is applied in a direction perpendicular to a bonding interface between the first polymer film and the second polymer film when bringing the surface of the surface-activated first inorganic material layer and the surface of the surface-activated second inorganic material layer into contact.

9. The method of bonding a polymer film according to claim 1 , wherein the step of bonding the first polymer film and the second polymer film is processed in a vacuum of 1×10 −5 Pa or less.

10. A method of bonding a polymer film, comprising the steps of:

supplying a first polymer film in tape form from a first supply roller;

supplying a second polymer film in tape form from a second supply roller;

forming a first inorganic material layer on the first polymer film supplied from the first supply roller;

forming a second inorganic material layer on the second polymer film supplied from the second supply roller;

surface-activating a surface of the first inorganic material layer by bombardment with particles having a predetermined kinetic energy;

surface-activating a surface of the second inorganic material layer by bombardment with particles having a predetermined kinetic energy;

bringing the surface of the surface-activated first inorganic material layer and the surface of the surface-activated second inorganic material layer into contact to bond the first polymer film and the second polymer film; and

winding a laminated polymer film formed by bonding the first polymer film and the second polymer film onto a winding roller,

wherein the first inorganic material layer and the second inorganic material layer are formed using silicon (Si) as a main component, and comprise iron.

11. The method of bonding a polymer film according to claim 10 , wherein the step of bonding the first polymer film and the second polymer film is processed in a vacuum of 1×10 −5 Pa or less.

12. A method of bonding a polymer film to an inorganic material substrate, comprising the steps of:

forming a first inorganic material layer on part or all of a polymer film;

forming a second inorganic material layer on part or all of an inorganic material substrate;

surface-activating a surface of the first inorganic material layer by bombardment with particles having a predetermined kinetic energy;

surface-activating a surface of the second inorganic material layer by bombardment with particle having a predetermined kinetic energy; and

bringing the surface of the surface-activated first inorganic material layer and the surface of the surface-activated second inorganic material layer into contact to bond the polymer film and the inorganic material substrate,

wherein the first inorganic material layer and the second inorganic material layer are formed using silicon (Si) as a main component, and comprise iron.

13. The method of bonding a polymer film to an inorganic material substrate according to claim 12 , wherein the step of bonding the polymer film and the inorganic material substrate is processed in a vacuum of 1×10 −5 Pa or less.

14. A polymer film laminate, comprising:

a first polymer film;

a second polymer film; and

an inorganic material layer disposed between part or all of the first polymer film and the second polymer film, and bonding the first polymer film and the second polymer film,

wherein the inorganic material layer is formed using silicon (Si) as a main component, and comprises iron.

15. The polymer film laminate according to claim 14 , wherein the first polymer film and the second polymer film are formed using a polyimide resin or a polyester resin as a main component.

16. The polymer film laminate according to claim 14 , wherein the inorganic material layer consists of layers of a plurality of materials.

17. The polymer film laminate according to claim 14 , wherein the first polymer film and the second polymer film are bonded in a vacuum of 1×10 −5 Pa or less.

18. A laminate of a polymer film and an inorganic material substrate, comprising:

a polymer film;

an inorganic material substrate; and

a bonding layer of inorganic material disposed between part or all of the polymer film and the inorganic material substrate, and bonding the polymer film and the inorganic material substrate,

wherein the inorganic material layer is formed using silicon (Si) as a main component, and comprises iron.

19. The laminate of a polymer film and an inorganic material substrate according to claim 18 , wherein the polymer film and the inorganic material substrate are bonded in a vacuum of 1×10 −5 Pa or less.