Gate with self-aligned ledged for enhancement mode GaN transistors
An enhancement-mode GaN transistor with reduced gate leakage current between a gate contact and a 2DEG region and a method for manufacturing the same. The enhancement-mode GaN transistor including a GaN layer, a barrier layer disposed on the GaN layer with a 2DEG region formed at an interface between the GaN layer and the barrier layer, and source contact and drain contacts disposed on the barrier layer. The GaN transistor further includes a p-type gate material formed above the barrier layer and between the source and drain contacts and a gate metal disposed on the p-type gate material, with wherein the p-type gate material including comprises a pair of self- aligned ledges that extend toward the source contact and drain contact, respectively.
1. A method for manufacturing an enhancement-mode GaN transistor, the method comprising:
forming a GaN layer;
forming a barrier layer on the GaN layer;
depositing source and drain contacts on the barrier layer;
depositing a p-type gate material on the barrier layer;
depositing a gate metal on the p-type gate material;
forming a photoresist over the gate metal;
etching the gate metal and the p-type gate material, wherein the step of etching the p-type gate material comprises forming side surfaces of the p-type gate material that extend horizontally towards the source and drain contacts, respectively, and contact the barrier layer; and
etching the gate metal to form a pair of ledges on the p-type gate material below the gate metal.
2. The method according to claim 1 , wherein the step of etching the gate metal comprises etching the gate metal to reduce a width of the gate metal, such that the width of the gate metal is less than a width of the p-type gate material.
3. The method according to claim 1 , wherein the pair of ledges of the p-type gate material are self-aligned.