Granted Patent B2

US 9,330,874 · App. 14/456,972 · Granted May 3, 2016

Abstract

Claims (38)

1. A method for sealing a cavity of a device formed in a fabrication substrate, comprising:

forming an electrically conductive layer on the fabrication substrate;

forming at least one release hole in the electrically conductive layer;

introducing an etchant through the release hole;

forming the cavity under the electrically conductive layer by removing material; and

sealing the cavity and release hole with a first quantity of low temperature solder and sealing a second release hole with a second quantity of low temperature solder, wherein the first quantity of low temperature solder is configured as a first electrical pad which provides a conductive path between a lower electrode and a voltage source and a second quantity of low temperature solder is configured as a second electrical pad which provides a conductive path between an upper electrode and the voltage source.

2. The method of claim 1 , wherein forming the cavity further comprises:

forming a sacrificial layer under the electrically conductive layer;

forming the release hole through the electrically conductive layer to the sacrificial layer; and

etching the sacrificial layer through the release hole to form the cavity.

3. The method of claim 2 , further comprising:

forming a flexible membrane over the sacrificial layer; and

releasing the flexible membrane by etching the sacrificial layer from the cavity.

4. The method of claim 3 , further comprising:

forming the first electrical pad which provides electrical access to the lower electrode; and

forming the second electrical pad which provides electrical access to the upper electrode, wherein the upper electrode is disposed over the flexible membrane.

5. The method of claim 4 , wherein the upper and lower electrodes form an electrostatically actuated device.

6. The method of claim 4 , wherein the first and second electrical pads comprise the first and a second quantity of low temperature solder.

7. The method of claim 4 , wherein forming a release hole comprises forming the release hole with reactive ion etching with a photoresist mask.

8. The method of claim 5 , wherein sealing the cavity comprises:

sealing the cavity with a quantity of low temperature solder dispensed through a heated nozzle over the at least one release hole.

9. The method of claim 8 , wherein the low temperature solder is dispensed in predefined locations on the substrate, by a robotically controlled dispenser.

10. The method of claim 2 , wherein etching the sacrificial layer comprises etching the sacrificial material in a vacuum chamber with about 2-4 Torr of XeF 2 .

11. A device with a cavity, comprising:

a cavity formed beneath an electrically conductive layer;

a release hole between the cavity and the electrically conductive layer;

a first quantity of low temperature solder material which substantially seals the cavity and the release hole from the ambient environment, and wherein the first quantity of low temperature solder is configured as first electrical pad which provides a conductive path between a lower electrode and a voltage source; and

a second quantity of low temperature solder is configured as a second electrical pad which provides a conductive path between an upper electrode and the voltage source.

12. The device of claim 11 , further comprising:

an electrically conductive material disposed beneath the cavity, which forms the lower electrode of an electrostatic switch, and is electrically coupled to the first quantity of low temperature solder on a top surface of the device.

13. The device of claim 12 , wherein the electrically conductive material disposed beneath the cavity is material of the fabrication substrate.

14. The device of claim 11 , further comprising:

a flexible membrane covering the cavity; and

an upper conductive material disposed on the flexible membrane, which forms the upper electrode of an electrostatic device.

15. The device of claim 14 , wherein the release hole formed between the first electrical pad and the cavity which is at least partially filled with the first quantity of low temperature solder.

16. The device of claim 15 , wherein the cavity has at least two regions, one extended region under the flexible membrane, and a second narrow region, wherein the second narrow region connects the release hole with the extended region.

17. The device of claim 14 , wherein the upper conductive material is also disposed in a laterally adjacent region, laterally adjacent to the upper electrode over the flexible membrane, and the laterally adjacent region is disposed directly beneath the second electrical pad.

18. The device of claim 17 , wherein the laterally adjacent region and the upper electrode are electrically connected by a narrow isthmus of the upper conductive material.

Assignments (9)