Photoresists and methods for use thereof
View Patent ↗New photoresists are provided that comprise preferably as distinct components: a resin, a photoactive component and a phenolic component Preferred photoresists of the invention are can be useful for ion implant lithography protocols.
1. A coated substrate comprising:
a semiconductor wafer having coated thereon a relief image of chemically-amplified positive-acting photoresist composition that comprises as distinct components (1) a resin wherein less than 15 percent of total repeat units of the resin are aromatic, (2) a photoactive component and (3) a phenolic component; and
the wafer having applied dopant ions.
2. The substrate of claim 1 wherein the phenolic component is a resin.
3. The substrate of claim 1 wherein the phenolic component is a polyhydroxystyrene resin.
4. The substrate of claim 1 wherein the photoresist composition is applied on an inorganic surface.
5. The substrate of claim 1 wherein the resin comprises photoacid-labile groups.
6. A coated substrate comprising:
a semiconductor wafer having coated thereon a relief image of chemically-amplified positive-acting photoresist composition that comprises as distinct components (1) a resin, (2) a photoactive component and (3) a polyhydroxystyrene resin.
7. The substrate of claim 6 wherein less than 15 percent of total repeat units of the resin are aromatic.
8. The substrate of claim 6 wherein the semiconductor wafer comprises applied dopant ions.
9. The substrate of claim 6 wherein the photoresist composition is applied on an inorganic surface.
10. The substrate of claim 6 wherein the resin comprises photoacid-labile groups.
11. A coated substrate comprising:
a semiconductor wafer having coated thereon a relief image of chemically-amplified positive-acting photoresist composition that comprises as distinct components (1) a resin wherein less than 15 percent of total repeat units of the resin are aromatic, (2) a photoactive component and (3) a phenolic component.
12. The substrate of claim 11 wherein the phenolic component is a resin.
13. The substrate of claim 11 wherein the phenolic component is a polyhydroxystyrene resin.
14. The substrate of claim 11 wherein the photoresist composition is applied on an inorganic surface.
15. The substrate of claim 11 wherein the resin comprises photoacid-labile groups.
16. The substrate of claim 1 wherein the (1) resin wherein less than 15 percent of total repeat units of the resin are aromatic, (2) photoactive component and (3) phenolic component are not covalently linked and are each different materials.
17. The substrate of claim 11 wherein the (1) resin wherein less than 15 percent of total repeat units of the resin are aromatic, (2) photoactive component and (3) phenolic component are not covalently linked and are each different materials.