Image sensors with inter-pixel light blocking structures
View Patent ↗An image sensor with an array of image sensor pixels is provided. Each pixel may include a photodiode and associated pixel circuits formed in a semiconductor substrate. Buried light shields may be formed on the substrate to present pixel circuitry that is formed in the substrate between two adjacent photodiodes from being exposed to incoming light. Metal interconnect muting structures may be formed over the buried light shields. In one embodiment, light blocking structures may be formed to completely seal the interconnect routing structures. The light blocking structures may be formed on top of the buried light shields or on the surface of the substrate. In another embodiment, planar light blocking structures that are parallel to the surface of the substrate may be formed between metal routing layers to help absorb stray light. Light blocking structures formed in these ways can help reduce optical crosstalk and enhance global shutter efficiency.
1. An image sensor, comprising:
a substrate;
a photosensitive element formed in the substrate;
a dielectric stack formed over the substrate;
interconnect routing structures formed in the dielectric stack;
light blocking structures that are formed in the dielectric stack and that completely seal the interconnect routing structures;
a gate conductor formed on the substrate; and
a buried light shield formed on the substrate, wherein the buried light shield has a window through which a via is formed to connect the gate conductor to the interconnect routing structures, and wherein the light blocking structures are formed on the buried light shield.
2. The image sensor defined in claim 1 , wherein the light blocking structures have a conical shape.
3. The image sensor defined in claim 1 , further comprising:
antireflective material formed on the light blocking structures.
4. The image sensor defined in claim 1 , further comprising:
a conductive ring interposed between the buried light shield and the light blocking structure.
5. A system, comprising:
a central processing unit;
memory;
a lens;
input-output circuitry; and
an imaging device, wherein the imaging device comprises:
a substrate;
first and second neighboring photodiodes formed in the substrate;
a dielectric stack formed over the substrate;
metal interconnect routing structures formed in the dielectric stack over a region in the substrate that separates the first and second neighboring photodiodes;
light blocking structures that prevent light from reaching the metal interconnect routing structures; and
buried light shielding structures, wherein the light blocking structures are formed on the buried light shielding structures.
6. The system defined in claim 5 , wherein the light blocking structures completely surround and seal the metal interconnect routing structures.
7. The system defined in claim 5 , wherein the buried light shielding structures comprise tungsten buried light shielding structures.
8. The system defined in claim 7 , wherein the light blocking structures are connected to the tungsten buried light shielding structures with a conductive ring.
9. An image sensor, comprising:
a substrate;
a photosensitive element formed in the substrate;
a dielectric stack formed over the substrate;
interconnect routing structures formed in the dielectric stack;
light blocking structures that are formed in the dielectric stack and that surround the interconnect routing structures, wherein the light blocking structures prevent light from reaching the interconnect routing structures; and
a buried light shield formed on the substrate, wherein the light blocking structures are formed on the buried light shield.
10. The image sensor defined in claim 9 , wherein the buried light shield comprises tungsten.
11. The image sensor defined in claim 9 , further comprising:
a conductive ring interposed between the buried light shield and the light blocking structures.
12. The image sensor defined in claim 11 , wherein the conductive ring is in direct contact with the buried light shield and the light blocking structures.