Manufacturing method of semiconductor device and semiconductor device manufactured thereby
View Patent ↗A method of manufacturing a semiconductor device that can be transferred to a circuit board with improved product reliability, and a semiconductor device manufactured according to the method, are described. A non-limiting example of the manufacturing method includes preparing a wafer having multiple semiconductor die portions formed on the semiconductor wafer, performing a sawing operation to separate the multiple semiconductor die portions into multiple discrete semiconductor die, arranging the multiple discrete semiconductor die on an adhesive member, encapsulating the multiple semiconductor die using an encapsulant, and performing a second sawing operation upon the encapsulated multiple semiconductor die to produce multiple individual encapsulated semiconductor devices.
1. A method of manufacturing a semiconductor device, the method comprising:
receiving a semiconductor wafer comprising a plurality of semiconductor die portions;
performing a first sawing operation on the semiconductor wafer to separate the semiconductor wafer into a plurality of discrete semiconductor die, each discrete semiconductor die comprising:
a first surface;
a second surface opposite the first surface;
a plurality of side surfaces connecting the first surface to the second surface;
a bond pad on the first surface; and
a conductive member extending from the bond pad in a direction perpendicular to the first surface;
arranging the plurality of discrete semiconductor die at a spacing distance from one another on an adhesive member such that the first surface of each of the plurality of discrete semiconductor die contacts the adhesive member;
applying an encapsulant to the plurality of discrete semiconductor die and to the adhesive member to produce an encapsulated plurality of semiconductor die; and
performing a second sawing operation upon the encapsulated plurality of semiconductor die, to produce a plurality of individual encapsulated semiconductor devices.
2. The method according to claim 1 , wherein said arranging comprises arranging the plurality of discrete semiconductor die such that the conductive member of each of the plurality of discrete semiconductor die is completely embedded in the adhesive member.
3. The method according to claim 2 , wherein the conductive member comprises a solder ball.
4. The method according to claim 1 , wherein said applying an encapsulant comprises encapsulating each of the plurality of discrete semiconductor die with the encapsulant only at the plurality of side surfaces of each of the plurality of discrete semiconductor die.
5. The method according to claim 1 , wherein said applying an encapsulant comprises encapsulating each of the plurality of discrete semiconductor die with the encapsulant only at the plurality of side surfaces and the second surface of each of the plurality of discrete semiconductor die.
6. The method according to claim 1 , wherein:
said applying an encapsulant comprises filling a space between neighboring side surfaces of the arranged plurality of discrete semiconductor die with encapsulant; and
said performing a second sawing operation comprises sawing the encapsulant formed between the side faces of the arranged plurality of discrete semiconductor die to produce a plurality of individual encapsulated semiconductor devices.
7. The method according to claim 1 , wherein said performing a second sawing operation comprises removing the adhesive member from the plurality of semiconductor devices.
8. The method according to claim 1 , comprising removing the plurality of semiconductor devices from the adhesive member after said performing a second sawing operation.
9. A method of manufacturing a semiconductor device, the method comprising:
receiving a semiconductor wafer comprising a plurality of semiconductor die portions;
performing a first sawing operation on the semiconductor wafer to separate the semiconductor wafer into a plurality of discrete semiconductor die, each discrete semiconductor die comprising:
a first surface;
a second surface opposite the first surface;
a plurality of side surfaces connecting the first surface to the second surface;
a bond pad on the first surface; and
a conductive member extending from the bond pad in a direction perpendicular to the first surface;
arranging the plurality of discrete semiconductor die at a spacing distance from one another on an adhesive member such that only a portion of the conductive member of each of the discrete semiconductor die is embedded in the adhesive member;
applying an encapsulant to the plurality of discrete semiconductor die and to the adhesive member to produce an encapsulated plurality of semiconductor die; and
performing a second sawing operation upon the encapsulated plurality of semiconductor die, to produce a plurality of individual encapsulated semiconductor devices.
10. The method according to claim 9 , wherein the conductive member comprises a solder ball.
11. The method according to claim 9 , wherein said applying an encapsulant comprises encapsulating each of the plurality of discrete semiconductor die with the encapsulant only at the plurality of side surfaces of each of the plurality of discrete semiconductor die.
12. The method according to claim 9 , wherein said applying an encapsulant comprises encapsulating each of the plurality of discrete semiconductor die with the encapsulant only at the plurality of side surfaces and the first surface of each of the plurality of discrete semiconductor die.
13. The method according to claim 9 , wherein said applying an encapsulant comprises encapsulating each of the plurality of discrete semiconductor die with the encapsulant at the plurality of side surfaces, the first surface, and the second surface of each of the plurality of discrete semiconductor die.
14. The method according to claim 9 , wherein said arranging the plurality of discrete semiconductor die comprises arranging the plurality of discrete semiconductor die such that 25% to 75% of the conductive member of each of the discrete semiconductor die is embedded in the adhesive member.
15. The method according to claim 9 , wherein said arranging the plurality of discrete semiconductor die comprises arranging the plurality of discrete semiconductor die such that 25% to 50% of the conductive member of each of the discrete semiconductor die is embedded in the adhesive member.
16. The method according to claim 9 , wherein:
said applying an encapsulant comprises filling a space between neighboring side surfaces of the arranged plurality of discrete semiconductor die with encapsulant; and
said performing a second sawing operation comprises sawing the encapsulant formed between the side faces of the arranged plurality of discrete semiconductor die to produce a plurality of individual encapsulated semiconductor devices.
17. The method according to claim 9 , wherein said performing a second sawing operation comprises removing the adhesive member from the plurality of semiconductor devices.
18. The method according to claim 9 , comprising removing the plurality of semiconductor devices from the adhesive member after said performing a second sawing operation.
19. A method of manufacturing a semiconductor device, the method comprising:
receiving a semiconductor wafer comprising a plurality of semiconductor die portions;
performing a first sawing operation on the semiconductor wafer to separate the semiconductor wafer into a plurality of discrete semiconductor die, each discrete semiconductor die comprising:
a first surface;
a second surface opposite the first surface;
a plurality of side surfaces connecting the first surface to the second surface;
a bond pad on the first surface; and
a conductive member extending from the bond pad in a direction perpendicular to the first surface;
arranging the plurality of discrete semiconductor die at a spacing distance from one another on an adhesive member such that the conductive member of each of the discrete semiconductor die contacts the adhesive member;
applying an encapsulant to the plurality of discrete semiconductor die and to the adhesive member to produce an encapsulated plurality of semiconductor die, wherein the plurality of side surfaces, the first surface, and the second surface of each of the plurality of discrete semiconductor die are encapsulated; and
performing a second sawing operation upon the encapsulated plurality of semiconductor die, to produce a plurality of individual encapsulated semiconductor devices.
20. The method according to claim 19 , wherein said arranging the plurality of discrete semiconductor die comprises arranging the plurality of discrete semiconductor die such that 25% to 50% of the conductive member of each of the discrete semiconductor die is embedded in the adhesive member.