Method and system for a gallium nitride self-aligned vertical MESFET
View Patent ↗A semiconductor structure includes a III-nitride substrate and a drift region coupled to the III-nitride substrate along a growth direction. The semiconductor substrate also includes a channel region coupled to the drift region. The channel region is defined by a channel sidewall disposed substantially along the growth direction. The semiconductor substrate further includes a gate region disposed laterally with respect to the channel region.
1. A method for fabricating a vertical metal-semiconductor field-effect transistor (MESFET), the method comprising:
providing a gallium nitride (GaN) substrate;
forming a first n-type GaN epitaxial layer coupled to the GaN substrate, a second n-type GaN epitaxial layer coupled to the first n-type GaN epitaxial layer, and a third n-type GaN epitaxial layer coupled to the second n-type GaN epitaxial layer;
forming a metallic contact electrically coupled to the third n-type GaN epitaxial layer;
removing at least a portion of the third n-type GaN epitaxial layer to form a source region;
forming a plurality of sacrificial layers coupled to the second n-type GaN epitaxial layer;
patterning the plurality of sacrificial layers to provide an etch mask coupled to the second n-type GaN epitaxial layer;
forming a self-aligned channel region; and
forming one or more Schottky metal structures coupled to the self-aligned channel region.
2. The method of claim 1 wherein the one or more Schottky metal structures are also self-aligned.
3. The method of claim 1 wherein the first n-type GaN epitaxial layer is characterized by a first dopant concentration;
the second n-type GaN epitaxial layer is characterized by a second dopant concentration; and
the third n-type GaN epitaxial layer is characterized by a third dopant concentration greater than the first dopant concentration and the second dopant concentration.
4. The method of claim 1 wherein the Schottky metal structure comprises at least one of nickel, platinum, palladium, or gold.
5. The method of claim 1 wherein forming the Schottky metal structure comprises using a sacrificial mask in a liftoff process.
6. The method of claim 5 wherein the sacrificial mask comprises an etch mask used in the removing at least the portion of the second n-type GaN epitaxial layer and the third n-type GaN epitaxial layer.
7. The method of claim 1 further comprising:
forming a second metallic structure electrically coupled to the GaN substrate; and
forming a third metallic structure electrically coupled to the third n-type GaN epitaxial layer.
8. The method of claim 1 wherein a thickness of the first n-type GaN epitaxial layer is between about 1 μm and about 100 μm.
9. The method of claim 1 wherein at least one of the first dopant concentration, the second dopant concentration, or the third dopant concentration varies as a function of thickness.
10. A method for fabricating a controlled switching device, the method comprising:
providing a III-nitride substrate;
forming a plurality of III-nitride epitaxial layers coupled to the III-nitride substrate;
forming a source contact coupled to one of the plurality of III-nitride epitaxial layers;
patterning the one of the plurality of III-nitride epitaxial layers to form a source region;
forming a first sacrificial layer, a second sacrificial layer, and third sacrificial layer, wherein the first sacrificial layer is coupled to another of the plurality of III-nitride epitaxial layers;
patterning the third sacrificial layer to form a hardmask;
patterning the second sacrificial layer;
patterning the first sacrificial layer, using the hardmask, to form a second hardmask;
patterning the another of the plurality of III-nitride epitaxial layers, using the second hardmask, to form a channel region; and
performing a metal lift-off process, using the hardmask, to form gate contacts.
11. The method of claim 10 further comprising forming an interlevel dielectric layer coupled to the gate contacts and the source contact.
12. The method of claim 10 wherein the first sacrificial layer and the third sacrificial layer comprise at least one of an oxide or a nitride.
13. The method of claim 10 wherein the second sacrificial layer comprises at least one of a metallic material or a material characterized by etch selectivity between sacrificial layers.
14. The method of claim 10 wherein patterning the second sacrificial layer comprises forming a masking element having a lateral width less than a lateral width of at least the first hardmask or the second hardmask.
15. The method of claim 10 wherein the gate contacts comprise a Schottky metal layer coupled to the another of the plurality of III-nitride epitaxial layers.
16. The method of claim 15 wherein the Schottky metal layer comprises at least one of nickel, platinum, palladium, or gold.
17. The method of claim 10 further comprising forming a drain contact electrically coupled to the III-nitride substrate.
18. The method of claim 10 wherein forming the Schottky metal layer comprises using a sacrificial mask in a liftoff process.
19. The method of claim 10 wherein a thickness of the first III-nitride epitaxial layer is between about 1 μm and about 100 μm.
20. The method of claim 19 wherein the thickness is between about 3 μm and 20 μm.
21. The method of claim 10 wherein at least one of the first dopant concentration, the second dopant concentration, or the third dopant concentration is non-uniform as a function of thickness.