FinFET low resistivity contact formation method
The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate, and wherein a surface of the strained material has received a passivation treatment; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a dielectric layer coating the sidewalls and bottom of the opening, wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm; a metal barrier coating an opening of the dielectric layer; and a metal layer filling a coated opening of the dielectric layer.
1. A method of forming a semiconductor device, the method comprising:
forming a fin on a substrate;
epitaxially growing a strained material in source/drain regions of the fin;
forming an inter-layer dielectric (ILD) layer over the substrate;
forming an opening in the ILD layer to expose the strained material;
passivating exposed portions of the strained material to form a treated surface;
forming a conductive dielectric layer over the treated surface;
forming a barrier metal layer over the conductive dielectric layer; and
forming a metallic contact plug over the barrier layer in the opening in the ILD layer.
2. The method of claim 1 , wherein the passivating exposed portions of the strained material comprises exposing the strained material to a gas and annealing.
3. The method of claim 2 , wherein the exposing the strained material to a gas comprises exposing the strained material to D 2 , H 2 , or NH 3 at a concentration between 1% and 100%.
4. The method of claim 2 , wherein the annealing comprises heating at a pressure between 2 and 30 atm.
5. The method of claim 4 , wherein the exposing the strained material to a gas comprises exposing the strained material to D 2 or H 2 .
6. The method of claim 1 , wherein the barrier metal layer is formed by depositing Ta, Zn, Sn, Cd, In, or Ru.
7. The method of claim 1 , further comprising forming a metal cap interface between the barrier metal layer and conductive dielectric layer.
8. A method of forming a semiconductor device, the method comprising:
forming a gate stack on a surface of a substrate;
forming a trench in the substrate adjacent to the gate stack;
forming a strained material in the trench;
forming an inter-layer dielectric (ILD) layer over the substrate;
forming a contact structure, wherein the forming the contact structure comprises:
forming an opening in the ILD layer to expose the strained material;
treating the strained material to form a passivation layer;
forming a conductive dielectric layer over the passivation layer;
forming a metallic barrier over the conductive dielectric layer; and
forming a metallic layer over the metallic barrier, wherein an upper surface of the metallic layer is coplanar with an upper surface of the ILD layer.
9. The method claim 8 , wherein the forming the strained material in the trench comprises epitaxially growing a material with a lattice constant different from a lattice constant of the substrate.
10. The method of claim 8 , wherein the forming the conductive dielectric layer comprises:
forming a metal layer over the passivation layer; and
exposing the metal layer to an oxygen-containing environment.
11. The method of claim 8 , wherein the forming the conductive dielectric layer comprises forming a thin layer of TiO, TiO 2 , Ti 2 O 3 , or Al 2 O 3 .
12. The method of claim 8 , wherein the forming the metallic barrier comprises depositing Ta, Zn, Sn, Cd, In, or Ru to a thickness between 0.5 nm and 3 nm.
13. The method of claim 8 , wherein the treating the strained material comprises annealing the strained material while exposed to D 2 , H 2 , or NH 3 .
14. The method of claim 8 , wherein the treating the strained material comprises annealing the strained material at a temperature between 300° C. and 600° C., and at a pressure between 2 atm and 30 atm.
15. The method of claim 14 , wherein the treating the strained material further comprises annealing the strained material while exposed to D 2 or H 2 .
16. A method of forming a semiconductor device, the method comprising:
forming an inter-layer dielectric (ILD) over source/drain regions;
forming openings in the ILD, the openings exposing the source/drain regions;
passivating exposed portions of the source/drain regions to form a treated surface; and
forming a contact in the openings over the treated surface.
17. The method of claim 16 , further comprising epitaxially growing an epitaxial material in the source/drain regions, wherein the passivating is performed on the epitaxial material.
18. The method of claim 17 , wherein the passivating reduces a density of interface traps in the epitaxial material.
19. The method of claim 16 , wherein the forming the contact comprises:
forming a conductive dielectric layer over the source/drain regions in the openings;
forming a metallic barrier over the conductive dielectric layer; and
forming a metallic layer over the metallic barrier, wherein an upper surface of the metallic layer is coplanar with an upper surface of the ILD layer.
20. The method of claim 16 , wherein the passivating comprises exposing the source/drain regions to a gas and annealing.