Integrated circuits and methods of forming integrated circuits
A method of forming an integrated circuit includes forming a gate electrode over a substrate, forming a recess in the substrate and adjacent to the gate electrode, forming a diffusion barrier structure in the recess, forming an N-type doped silicon-containing structure over the diffusion barrier structure and thermally annealing the N-type doped silicon-containing structure. The diffusion barrier structure includes a first portion and a second portion. The first portion is adjacent to the gate electrode and the second portion is distant from the gate electrode. The first portion of the diffusion barrier structure is configured to partially prevent N-type dopants of the N-type doped silicon-containing structure from diffusing into the substrate and the second portion of the diffusion barrier structure is configured to substantially completely prevent N-type dopants of the N-type doped silicon-containing structure from diffusing into the substrate.
1. A method of forming an integrated circuit, the method comprising:
forming a gate electrode over a substrate;
forming a recess in the substrate and adjacent to the gate electrode;
forming a diffusion barrier structure in the recess, wherein the forming the diffusion barrier structure includes forming a carbon-implanted region and forming a carbon-containing deposited region;
forming an N-type doped silicon-containing structure over the diffusion barrier structure, wherein the first portion of the diffusion barrier structure is configured to partially prevent N-type dopants of the N-type doped silicon-containing structure from diffusing into the substrate and the second portion of the diffusion barrier structure is configured to substantially completely prevent N-type dopants of the N-type doped silicon-containing structure from diffusing into the substrate, and
thermally annealing the N-type doped silicon-containing structure.
2. The method of claim 1 , wherein forming the diffusion barrier structure comprises:
forming the carbon-implanted region having a carbon concentration of about 0.1 atomic percent (%) to about 1 atomic percent.
3. The method of claim 2 , wherein forming the carbon-containing deposited region comprises forming a first region in a first portion of the diffusion barrier structure, and a second region in a second portion of the diffusion barrier structure, and the first region is thinner than the second region.
4. The method of claim 1 , wherein forming the recess in the substrate comprises:
removing a portion of the substrate to form the recess, wherein a sidewall of the recess is directly under the gate electrode, and the sidewall of the recess is misaligned from a sidewall of the gate electrode by about 2 nm or less.
5. The method of claim 1 , wherein forming the recess in the substrate comprises:
removing a portion of the substrate to form the recess, wherein a sidewall of the recess is not directly under the gate electrode, and the sidewall of the recess is misaligned from a sidewall of the gate electrode by about 10 nm or less.
6. The method of claim 1 , wherein forming the N-type doped silicon-containing structure comprises:
forming the N-type doped silicon-containing structure over the diffusion barrier structure, wherein the N-type doped silicon-containing structure has a dopant concentration ranging from about 2E20cm −3 to about 1E21cm −3 .
7. The method of claim 6 , wherein thermally annealing the N-type doped silicon-containing structure comprises:
performing at least one preheat anneal, wherein the at least one preheat anneal is performed at a temperature in a range from about 500° C. to about 700° C. for a duration in a range from about 5 seconds to about 10 seconds, and
performing a spike anneal, wherein the spike anneal is performed at a temperature in a range from about 845° C. to about 940° C. for a duration in a range from about 0.7 second to about 2.4 seconds.
8. The method of claim 6 , wherein thermally annealing the N-type doped silicon-containing structure comprises:
performing at least one preheat anneal, wherein the at least one preheat anneal is performed at a temperature in a range from about 500° C. to about 800° C. for a duration in a range from about 2 seconds to about 20 seconds, and
performing a spike anneal, wherein the spike anneal is performed at a peak temperature in a range from about 1,000° C. to about 1,100° C. for a duration in a range from about 0.8 ms to about 15 ms.
9. The method of claim 1 , wherein the deposited carbon containing region is a composite carbon containing region.
10. A method of forming a semiconductor device, the method comprising:
forming a gate electrode over a substrate;
forming a recess in the substrate and adjacent to the gate electrode;
forming a diffusion barrier structure in the recess, wherein the diffusion barrier structure comprises:
a first portion having a first thickness in a first direction parallel to a top surface of the substrate;
a second portion having a second thickness in a second direction perpendicular to the first direction; and
a third portion connecting the first portion to the second portion, wherein the first thickness is greater than the second thickness;
forming a doped silicon-containing structure over the diffusion barrier structure; and
thermally annealing the doped silicon-containing structure.
11. The method of claim 10 , wherein forming the diffusion barrier structure comprises:
forming a carbon-containing layer in the recess, wherein the carbon-containing layer has a carbon concentration of about 0.1 atomic percent (%) to about 1 atomic percent.
12. The method of claim 10 , further comprising forming an N-type doped region in the substrate before forming the recess in the substrate.
13. The method of claim 12 , wherein forming the N-type doped region in the substrate comprises:
implanting phosphorus or arsenic dopants in the substrate; and
thermally annealing the N-type doped silicon-containing structure comprising performing a spike anneal at a temperature of about 950° C.
14. The method of claim 10 , wherein forming the recess in the substrate comprises:
removing a portion of the substrate to form the recess, wherein a sidewall of the recess is directly under the gate electrode, and the sidewall of the recess is misaligned from a sidewall of the gate electrode by about 2 nm or less.
15. The method of claim 10 , wherein forming the recess in the substrate comprises:
removing a portion of the substrate to form the recess, wherein a sidewall of the recess is not directly under the gate electrode, and the sidewall of the recess is misaligned from a sidewall of the gate electrode by about 10 nm or less.
16. The method of claim 10 , wherein forming the doped silicon-containing structure comprises:
forming an N-type doped silicon-containing structure over the diffusion barrier structure, wherein the N-type doped silicon-containing structure has a dopant concentration ranging from about 2E20cm −3 to about 1E21cm −3 .
17. The method of claim 16 , wherein thermally annealing the doped silicon-containing structure comprises:
performing at least one preheat anneal, wherein the at least one preheat anneal is performed at a temperature in a range from about 500° C. to about 700° C. for a duration in a range from about 5 seconds to about 10 seconds, and
performing a spike anneal, wherein the spike anneal is performed at a temperature in a range from 845° C. to about 940° C. for a duration in a range from about 0.7 second to about 2.4 seconds.
18. The method of claim 16 , wherein thermally annealing the doped silicon-containing structure comprises:
performing at least one preheat anneal, wherein the at least one preheat anneal is performed at a temperature in a range from about 500° C. to about 800° C. for a duration in a range from about 2 seconds to about 20 seconds, and
performing a spike anneal, wherein the spike anneal is performed at a peak temperature in a range from about 1,000° C. to about 1,100° C. for a duration in a range from about 0.8 ms to about 15 ms.
19. The method of claim 10 , wherein forming the diffusion barrier structure in the recess further comprises forming a carbon-containing film in the recess.
20. A method of making a semiconductor device comprising:
forming a gate electrode over a substrate;
forming carbon implanted regions in the substrate and adjacent to the gate electrode;
forming a recess in the substrate and adjacent to the gate electrode;
forming a carbon-containing structure in the recess, wherein the carbon-containing structure comprises:
a first portion having a first thickness in a first direction parallel to a top surface of the substrate;
a second portion having a second thickness in a second direction perpendicular to the first direction; and
a third portion connecting the first portion to the second portion, wherein the first thickness is greater than the second thickness;
forming an N-type doped silicon-containing structure over the carbon-containing structure; and
thermally annealing the N-type doped silicon-containing structure.