Optimized wires for resistance or electromigration
Optimized metal wires for resistance or electromigration, methods of manufacturing thereof and design methodologies are disclosed. The method includes depositing metal material within openings and on a surface of dielectric material resulting in metal filled openings and a topography of recessed areas aligned with the metal filled openings. The method further includes depositing an alloying material over the metal material, including within the recessed areas. The method further includes planarizing the metal material, leaving the alloying material within the recessed areas. The method further includes diffusing the alloying material into the metal material forming alloyed regions self-aligned with the metal filled openings.
1. A method comprising:
depositing metal material within openings and on a surface of dielectric material resulting in metal filled openings and a topography of recessed areas aligned with the metal filled openings;
depositing an alloying material over the metal material, including within the recessed areas;
depositing a second metal material on the alloying material, including within the recessed areas, to completely fill the recessed areas, wherein the second metal material is doped with the alloying material;
planarizing the metal material and the second metal material, leaving the alloying material within the recessed areas; and
diffusing the alloying material and the second metal material into the metal material forming alloyed regions self-aligned with the metal filled openings.
2. The method of claim 1 , wherein the openings in the dielectric material are formed by a dual damascene process.
3. The method of claim 1 , wherein the metal filled openings are via interconnects and wiring structures.
4. The method of claim 3 , wherein the depositing of the metal material is an electroplating deposition.
5. The method of claim 4 , wherein the deposition is a copper electroplating bath resulting in the openings being filled with copper material.
6. The method of claim 5 , wherein the alloying material is a film of Mn.
7. The method of claim 5 , wherein the alloying material is one of Mn, Al, Co, Sn, Pd, C, Ca, Mg, and Hf.
8. The method of claim 1 , wherein the diffusing of the alloying material occurs during an annealing process.
9. The method of claim 1 , wherein the diffusing of the alloying material occurs during a deposition of a capping material formed on a planarized surface of the metal material.
10. The method of claim 9 , wherein the capping material is silicon nitride.
11. The method of claim 9 , wherein the planarized surface is formed by a chemical mechanical polishing process which leaves the alloying material within the recessed areas.
12. The method of claim 1 , wherein the depositing of the metal material within the openings includes depositing a barrier layer on sidewalls and a bottom of the openings followed by a copper fill process.
13. The method of claim 12 , wherein the barrier layer is at least one of tantalum and tantalum nitride.
14. The method of claim 12 , wherein the depositing of the alloying material is a deposition of a film on the metal material.
15. The method of claim 12 , wherein the depositing of the alloying material is a doped copper material deposited on the metal material.
16. The method of claim 15 , wherein the doped copper material is doped with one of Mn, Al, Co, Sn, Pd, C, Ca, Mg, and Hf.
17. The method of claim 1 , further comprising depositing a liner material within openings and on a surface of dielectric material and a bottom of the openings to contact with underlying metal wirings, prior to depositing of the metal material.
18. The method of claim 17 , further comprising planarizing the liner material, the metal material, the alloying material, and the second metal material to a level of the dielectric material.
19. The method of claim 18 , wherein the depositing of the second metal material is an electroplating deposition.
20. The method of claim 1 , wherein material of the metal material is similar to material of the second metal material.