Semiconductor device and related fabrication methods
View Patent ↗Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a collector region of semiconductor material having a first conductivity type, a base region of semiconductor material within the collector region, the base region having a second conductivity type opposite the first conductivity type, and a doped region of semiconductor material having the second conductivity type, wherein the doped region is electrically connected to the base region and the collector region resides between the base region and the doped region. In exemplary embodiments, the dopant concentration of the doped region is greater than a dopant concentration of the collector region to deplete the collector region as the electrical potential of the base region exceeds that of the collector region.
1. A method of fabricating a bipolar transistor on a semiconductor substrate, the method comprising:
forming a first region of semiconductor material having a first conductivity type in the semiconductor substrate;
forming a collector region of semiconductor material having a second conductivity type opposite the first conductivity type overlying the first region;
forming a second region of semiconductor material having the first conductivity type that abuts the first region;
forming a base region of semiconductor material having the first conductivity type within the collector region of semiconductor material; and
providing an electrical connection between the base region and the second region, the electrical connection resulting in the base region and the second region having the same electrical potential.
2. The method of claim 1 , wherein forming the collector region comprises forming the collector region having a dopant concentration that is less than a dopant concentration of the first region.
3. The method of claim 1 , wherein a dopant concentration of the first region is greater than a dopant concentration of the collector region.
4. The method of claim 1 , the semiconductor substrate comprising a support layer of semiconductor material, a buried layer of dielectric material overlying the support layer, and a second layer of semiconductor material overlying the buried layer, wherein forming the first region comprises forming the first region in the second layer.
5. The method of claim 1 , wherein:
forming the collector region comprises forming an epitaxial layer of semiconductor material having the second conductivity type on the first region; and
forming the second region comprises implanting, into the epitaxial layer, ions having the first conductivity type and a dopant concentration greater than a dopant concentration of the epitaxial layer.
6. The method of claim 1 , the semiconductor substrate comprising a silicon-on-insulator substrate including a layer of semiconductor material overlying an insulating layer, wherein:
forming the first region comprises implanting ions having the first conductivity type into the layer of semiconductor material; and
forming the collector region comprises forming an epitaxial layer of semiconductor material having the second conductivity type on the first region.
7. The method of claim 6 , wherein forming the epitaxial layer of semiconductor material comprises epitaxially growing, on the first region, in-situ doped semiconductor material having a dopant concentration that is less than a dopant concentration of the first region.
8. The method of claim 7 , wherein forming the second region comprises implanting, into the epitaxial layer, ions having the first conductivity type and a dopant concentration greater than the dopant concentration of the epitaxial layer.
9. A method of fabricating a bipolar transistor on a semiconductor substrate, the method comprising:
forming a buried region having a first conductivity type in the semiconductor substrate;
forming a collector region overlying the buried region, the collector region having a second conductivity type opposite the first conductivity type;
forming a base region within the collector region, the base region having the first conductivity type, wherein at least a first portion of the collector region resides between the base region and the buried region; and
forming a sinker region having the first conductivity type in the semiconductor substrate, wherein:
the sinker region abuts the buried region; and
at least a second portion of the collector region resides between the sinker region and the base region; and
providing an electrical connection between the base region and the sinker region, the electrical connection resulting in the base region and the sinker region having the same electrical potential.
10. The method of claim 9 , wherein forming the sinker region comprises forming the sinker region laterally surrounding the collector region.
11. The method of claim 9 , wherein forming the collector region comprises forming the collector region having a dopant concentration that is less than a dopant concentration of the buried region within the buried region.
12. The method of claim 11 , wherein forming the collector region comprises forming the collector region having the dopant concentration that is less than a dopant concentration of the sinker region.
13. The method of claim 9 , wherein:
forming the collector region comprises implanting ions having the second conductivity type and a first dopant concentration into the layer of semiconductor material; and
forming the sinker region comprises implanting ions having the first conductivity type and a second dopant concentration into the semiconductor substrate, wherein the first dopant concentration is less than the second dopant concentration.
14. The method of claim 9 , further comprising forming an emitter region having the second conductivity type within the base region.
15. A method of fabricating a semiconductor device on a semiconductor substrate, the method comprising:
forming a first region of semiconductor material having a first conductivity type in the semiconductor substrate;
forming a collector region having a second conductivity type overlying the first region, the second conductivity type being opposite the first conductivity type;
forming a sinker region laterally surrounding the collector region and abutting the first region in the semiconductor substrate, the sinker region having the first conductivity type;
forming a base region having the first conductivity type within the collector region, at least a first portion of the collector region residing between the sinker region and the base region and at least a second portion of the collector region residing between the base region and the first region;
forming an emitter region having the second conductivity type within the base region; and
providing an electrical connection between the base region and the sinker region, the electrical connection resulting in the base region and the sinker region having the same electrical potential.
16. The method of claim 15 , wherein:
forming the collector region comprises forming an epitaxial layer of semiconductor material having the second conductivity type on the first region; and
forming the sinker region comprises implanting, into the epitaxial layer, ions having the first conductivity type and a dopant concentration greater than a dopant concentration of the epitaxial layer.
17. The method of claim 15 , the semiconductor substrate comprising a silicon-on-insulator substrate including a layer of semiconductor material overlying an insulating layer, wherein:
forming the first region comprises implanting ions having the first conductivity type into the layer of semiconductor material; and
forming the collector region comprises forming an epitaxial layer of semiconductor material having the second conductivity type on the first region.
18. The method of claim 17 , wherein forming the epitaxial layer of semiconductor material comprises epitaxially growing, on the first region, in-situ doped semiconductor material having a dopant concentration that is less than a dopant concentration of the first region.
19. The method of claim 18 , wherein forming the second region comprises implanting, into the epitaxial layer, ions having the first conductivity type and a dopant concentration greater than the dopant concentration of the epitaxial layer.