Selective Fin-shaping process
A method of forming a fin field-effect transistor (FinFET) includes forming a plurality of fins on a substrate. The method further includes forming an oxide layer on the substrate, wherein a bottom portion of each fin of the plurality of fins is embedded in the oxide layer, and the bottom portion of each fin of the plurality of fins has substantially a same shape. The method further includes shaping at least one fin of the plurality of fins, wherein a top portion of the at least one fin has a different shape from a top portion of another fin of the plurality of fins.
1. A method of forming a fin field-effect transistor (FinFET), the method comprising:
forming a plurality of fins on a substrate;
forming an oxide layer on the substrate, wherein a bottom portion of each fin of the plurality of fins is embedded in the oxide layer, and the bottom portion of each fin of the plurality of fins has a same shape; and
shaping at least one fin of the plurality of fins, wherein a top portion of the at least one fin has a different shape from a top portion of another fin of the plurality of fins, wherein shaping the at least one fin comprises epitaxially growing undoped silicon on the top portion of the at least one fin.
2. The method of claim 1 , further comprising forming a gate structure over each fin of the plurality of fins.
3. The method of claim 1 , wherein shaping the at least one fin of the plurality of fins comprises reducing a height of the top portion of the at least one fin above the oxide layer.
4. The method of claim 1 , wherein shaping the at least one fin of the plurality of fins comprises increasing a width of the top portion of the at least one fin.
5. The method of claim 1 , wherein shaping the at least one fin comprises rounding a top surface of the at least one fin.
6. A method of forming a fin field-effect transistor (FinFET), said method comprising:
forming a plurality of fins partially embedded in a shallow trench isolation (STI) layer on a semiconductor substrate;
patterning a photoresist layer over the plurality of fins to form one or more openings exposing a single fin; and,
shaping the exposed single fin, wherein shaping the exposed single fin comprises etching a portion of the exposed single fin.
7. The method of claim 6 , wherein shaping the exposed single fin comprises:
doping a portion of the exposed single fin with a dopant; and
etching the doped portion of the exposed single fin.
8. The method of claim 6 , further comprising:
depositing a dielectric layer over the STI layer to completely cover the plurality of fins, wherein the patterned photoresist layer is over the dielectric layer;
etching the dielectric layer to expose the single fin;
removing the photoresist layer; and,
shaping the exposed single fin.
9. A method of forming a fin field effect transistor (FinFET), the method comprising:
forming a first fin having an upper portion and a lower portion;
forming a first gate structure over the first fin;
forming a second fin having an upper portion and a lower portion, wherein a shape of the upper portion of the first fin is different from a shape of the upper portion of the second fin;
forming a second gate structure over the second fin, wherein forming the first gate structures comprises forming the first gate structure continuous with the second gate structure; and
forming an isolation feature between the first fin and the second fin, wherein the lower portion of the first fin and the lower portion of the second fin are both embedded in the isolation feature.
10. The method of claim 9 , wherein forming the first fin comprises forming the first fin having a width of the upper portion less than a width of the upper portion of the second fin.
11. The method of claim 9 , further comprising:
forming a third fin having an upper portion and a lower portion, wherein the lower portion of the third fin is embedded in the isolation structure, and the second fin is between first fin and the third fin; and
forming a third gate structure over the third fin.
12. The method of claim 11 , wherein forming the third fin comprises forming the upper portion of the third fin having a same shape as the upper portion of the first fin.
13. The method of claim 11 , wherein forming the third fin comprises forming the upper portion of the third fin having a different shape from the shape of the upper portion of the first fin.
14. The method of claim 1 , wherein epitaxially growing the undoped silicon on the top portion of the at least one fin comprises tuning an etching gas during the epitaxially growing.
15. The method of claim 14 , wherein tuning the etching gas comprises tuning hydrochloric acid gas.
16. The method of claim 1 , further comprising forming a continuous gate structure over the plurality of fins.
17. The method of claim 7 , wherein doping the portion of the exposed single fin comprises doping a sidewall of the exposed single fin adjacent to the STI layer.
18. The method of claim 7 , wherein doping the portion of the exposed single fin comprises doping less than an entirety of a width of the portion of the exposed single fin.
19. The method of claim 6 , further comprising forming a continuous gate structure over the plurality of fins.
20. The method of claim 9 , further comprising:
doping an entirety of a sidewall of the upper portion of the first fin to form a doped region; and
removing the doped region.