Charged particle beam apparatus and sample observation method
View Patent ↗A charged particle beam apparatus includes an electron beam column and an FIB column, in which an irradiation axis of the electron beam column and an irradiation axis of the FIB column are disposed to be perpendicular or substantially perpendicular to each other on a sample without interference. In addition, the first sample stage and a second sample stage are independently provided and moved to be tilted centering on an axial direction. The sample is moved by the first sample stage and a sample piece which is cut off from the sample is moved to be fixed to a tip end of a probe which is rotatable centering on the axial direction, thereby manufacturing the sample piece which reduces the influence of a curtaining effect.
1. A charged particle beam apparatus comprising:
an electron beam column configured to irradiate a sample with an electron beam;
an ion beam column, which is disposed substantially perpendicular to the electron beam column, and which is configured to irradiate the sample with an ion beam to perform an etching process;
a detector configured to detect a charged particles generated from the sample;
an image forming unit configured to form a charged particle image by using detection signals from the detector;
a first sample stage, which is configured to hold the sample, and which is movable to be tilted;
a second sample stage, which has a sample holder configured to hold a sample piece cut off from the sample, which is movable to be tilted, and which is configured to move the sample holder in a direction substantially perpendicular to an irradiation axis of the electron beam to an irradiated area of the electron beam; and
a probe that is rotatable about an axis while holding the sample piece.
2. The charged particle beam apparatus according to claim 1 , wherein a tilt axis of the first sample stage is disposed to be substantially parallel to a tilt axis of the second sample stage.
3. The charged particle beam apparatus according to claim 1 , wherein the probe is configured to be driven independently from the first sample stage and the second sample stage.
4. The charged particle beam apparatus according to claim 1 , wherein the probe is disposed closer than the first sample stage to the ion beam column.
5. The charged particle beam apparatus according to claim 1 , wherein the detector is a transmission electron detection unit that is configured to detect the charged particles in a state where the sample is held in the first sample stage and the sample is held in the second sample stage.
6. The charged particle beam apparatus according to claim 1 , wherein the second sample stage is configured to move the sample holder in a direction substantially perpendicular to an irradiation axis of the ion beam.
7. The charged particle beam apparatus according to claim 1 , wherein the second sample stage accommodates therein the sample holder while exposing the sample holder around a position corresponding to an irradiated path of the electron beam when the sample holder is moved to the irradiated area of the electron beam.
8. A sample observation method comprising the steps of:
irradiating a sample with an electron beam;
irradiating the sample with an ion beam in a direction substantially perpendicular to the electron beam to perform an etching process;
detecting a charged particles generated from the sample;
forming a charged particle image by using detection signals from a detector;
holding the sample;
holding a sample piece, which is cut off from the sample, by a sample holder that has been moved to an irradiation axis of the electron beam; and
rotating centering on an axial direction while holding the sample piece.