Method of singulating LED wafer substrates into dice with LED device with Bragg reflector
View Patent ↗A method of dicing semiconductor devices from a substrate includes forming a Bragg reflector over a bottom side of the substrate, where the bottom side is opposite of a top side, generating a pattern of defects in the substrate with a laser beam from the bottom side of the substrate, and applying pressure to the substrate to dice the substrate along the pattern of defects. The Bragg reflector includes a first layer of dielectric material having a first index of refraction and a second dielectric material having a second index of refraction different from the first index of refraction.
1. A method of dicing semiconductor devices from a substrate, comprising:
forming a Bragg reflector over a bottom side of the substrate, wherein the bottom side is opposite of a top side and the Bragg reflector comprises a first layer of dielectric material having a first index of refraction and a second dielectric material having a second index of refraction different from the first index of refraction;
forming a plurality of LED layers over the top side of the substrate, wherein the semiconductor devices comprise LED dice;
generating a pattern of defects in the substrate with a laser beam from the bottom side of the substrate; and
applying pressure to the substrate to dice the substrate along the pattern of defects.
2. The method of claim 1 , further comprising selectively removing portions of the Bragg reflector to expose portions of the bottom side of the substrate.
3. The method of claim 1 , wherein generating the pattern of defects comprises generating the pattern of defects in the substrate with a laser beam through the Bragg reflector.
4. The method of claim 3 , wherein a peak wavelength of the laser beam is transmitted through the first and second dielectric layers which are transparent to the peak wavelength of the laser beam.
5. The method of claim 1 , wherein the substrate comprises sapphire, the LED layers comprise III-nitride semiconductor layers, and the Bragg reflector comprises a stack of layers comprising at least two TiO 2 , SiO 2 , Si 3 N 4 , Ta 2 O 5 , HfO 2 , Al 2 O 3 , ZrO 2 or ZnO.
6. The method of claim 5 , wherein the LED layers comprise III-nitride nanowire based LED layers formed over GaN buffer layer located on the top side of the sapphire substrate, and the Bragg reflector comprises a stack of alternating layers of TiO 2 and SiO 2 deposited by evaporation, and the Bragg reflector has a thicknesses of t=λ/4n, where λ is the wavelength that is desired to be reflected and n is the index of refraction of material comprising the Bragg reflector.