Direct bonded copper semiconductor packages and related methods
View Patent ↗A power semiconductor package includes a first direct bonded copper (DBC) substrate having a plurality of connection traces on a first face of the first DBC substrate. A plurality of die are coupled to the connection traces, each die coupled to one of the connection traces at a first face of the die. A second DBC substrate includes connection traces on a first face of the second DBC substrate. A second face of each die is coupled to one of the connection traces of the first face of the second DBC substrate. A cavity between the first face of the first DBC substrate and the first face of the second DBC substrate is filled with an encapsulating compound. Terminal pins may be coupled to connection traces on the first face of the first DBC substrate. More than two DBC substrates may be stacked to form a stacked power semiconductor package.
1. A method of forming a power semiconductor package, comprising:
coupling a first face of each of a plurality of die with one of a plurality of connection traces of a first face of a first direct bonded copper (DBC) substrate using sintering paste;
coupling a second face of each of the plurality of die with one of a plurality of connection traces of a first face of a second DBC substrate using sintering paste, wherein the first DBC substrate and second DBC substrate each comprise a double DBC substrate comprising a ceramic plate sandwiched between a first copper layer and a second copper layer, wherein the first copper layer of the first DBC substrate comprises the connection traces of the first DBC substrate and wherein the first copper layer of the second DBC substrate comprises the connection traces of the second DBC substrate;
sintering the sintering paste using heat and pressure; and
filling a cavity between the first face of the first DBC substrate and the first face of the second DBC substrate with an encapsulating compound forming a power semiconductor package.
2. The method of claim 1 , wherein the sintering paste is a silver sintering paste.
3. The method of claim 1 , wherein the encapsulating compound is a silicone gel and wherein filling the cavity comprises applying a vacuum at a first end of the cavity while dispensing the encapsulating compound at a second end of the cavity.
4. The method of claim 1 , further comprising coupling each of a plurality of terminal pins to one of the connection traces of the first face of the first DBC substrate.
5. A method of forming a power semiconductor package, comprising:
coupling a first face of each of a first plurality of die with one of a plurality of connection traces of a first face of a first direct bonded copper (DBC) substrate using sintering paste;
coupling a second face of each of the first plurality of die with one of a plurality of connection traces of a first face of a second DBC substrate using sintering paste;
coupling a first face of each of a second plurality of die with one of a plurality of connection traces of a second face of the second DBC substrate using sintering paste;
coupling a second face of each of the second plurality of die with one of a plurality of connection traces of a first face of a third DBC substrate using sintering paste;
sintering the sintering paste using heat and pressure;
filling a first cavity between the first face of the first DBC substrate and the first face of the second DBC substrate, and filling a second cavity between the second face of the second DBC substrate and the first face of the third DBC substrate with an encapsulating compound, and;
coupling each of a plurality of terminal pins to one of the connection traces of the first face of the first DBC substrate to form a semiconductor package.
6. The method of claim 5 , further comprising coupling a first face of each of a third plurality of die with one of a plurality of connection traces of a second face of the third DBC substrate using sintering paste.
7. The method of claim 5 , wherein the sintering paste is a silver sintering paste.
8. The method of claim 5 , wherein the encapsulating compound is a silicone gel.
9. The method of claim 5 , wherein the first DBC substrate and second DBC substrate each comprise a double DBC substrate comprising a ceramic plate sandwiched between a first copper layer and a second copper layer.