Vias in porous substrates
View Patent ↗A microelectronic unit can include a substrate having front and rear surfaces and active semiconductor devices therein, the substrate having a plurality of openings arranged in a symmetric or asymmetric distribution across an area of the rear surface, first and second conductive vias connected to first and second pads exposed at the front surface, pluralities of first and second conductive interconnects extending within respective ones of the openings, and first and second conductive contacts exposed for interconnection with an external element. The plurality of first conductive interconnects can be separated from the plurality of second conductive interconnects by at least one of the plurality of openings, the at least one opening at least partially filled with an insulating material. The distribution of the openings can include at least m openings spaced apart in a first direction and n openings spaced apart in a second direction transverse to the first direction.
1. A method of fabricating a microelectronic unit, comprising:
forming a plurality of openings extending from a first surface of a semiconductor substrate towards a second surface remote therefrom, the openings arranged in a symmetric or asymmetric distribution across an area of the first surface, with at least m openings spaced apart in a first direction along the first surface and n openings spaced apart in a second direction along the first surface transverse to the first direction, each of m and n being greater than 1, the substrate embodying a plurality of active semiconductor devices, the substrate having a plurality of conductive pads exposed at the second surface;
forming pluralities of first and second conductive interconnects extending within respective first and second subsets of the openings, the plurality of first conductive interconnects extending within at least two adjacent ones of the first subset of the openings spaced apart in the first direction and within at least two adjacent ones of the first subset of the openings spaced apart in the second direction, the plurality of second conductive interconnects extending within at least two adjacent ones of the second subset of the openings spaced apart in the first direction and within at least two of the second subset of the openings spaced apart in the second direction;
forming first and second conductive vias electrically connected with respective first and second pads of the plurality of conductive pads, each first conductive interconnect being electrically connected to the first conductive via, each second conductive interconnect being electrically connected to the second conductive via; and
depositing an insulating dielectric material at least partially filling at least one of the plurality of openings, wherein the plurality of first conductive interconnects is separated from the plurality of second conductive interconnects in a horizontal direction substantially parallel to the first surface by the at least one of the plurality of openings.
2. The method as claimed in claim 1 , wherein each conductive interconnect includes a portion extending in a vertical direction substantially perpendicular to the first surface, the plurality of first conductive interconnects being separated from one another in a horizontal direction substantially parallel to the first surface by material of the semiconductor substrate.
3. The method as claimed in claim 1 , wherein the step of depositing the insulating dielectric material is performed before the steps of forming the conductive interconnects.
4. The method as claimed in claim 1 , further comprising forming first and second conductive contacts exposed for interconnection with an external element, the first and second conductive contacts being electrically connected to the first and second conductive interconnects, respectively.
5. The method as claimed in claim 1 , wherein the first and second conductive contacts are aligned in a vertical direction substantially perpendicular to the first surface with the respective first and second conductive interconnects.
6. The method as claimed in claim 1 , wherein the plurality of openings are formed such that the first and second conductive vias are exposed within some of the plurality of openings, and the first and second conductive interconnects are formed in contact with the first and second conductive vias, respectively.
7. The method as claimed in claim 1 , wherein the step of forming the plurality of openings is performed by anisotropic etching, such that a region of porous silicon is produced extending from the first surface of the substrate.
8. The method as claimed in claim 1 , wherein the locations of the symmetric or asymmetric distribution of the openings is not determined by a mask.
9. The method as claimed in claim 1 , wherein the first and second conductive vias are connectable to respective first and second electric potentials.
10. The method as claimed in claim 1 , further comprising forming first and second apertures extending through the respective first and second pads by processing applied to the pads from above the second surface.
11. The method as claimed in claim 10 , wherein the first and second conductive vias are formed within the respective first and second apertures and extending through the respective first and second pads.
12. The method as claimed in claim 10 , wherein a contact portion of each conductive via is exposed at the second surface for interconnection with an external element.
13. The method as claimed in claim 10 , wherein the step of forming the first and second apertures includes removing material from the semiconductor substrate such that the apertures extend partially through a thickness of the semiconductor substrate.
14. The method as claimed in claim 10 , wherein the step of forming the first and second apertures is performed such that a surface of each of the respective first and second conductive interconnects is exposed within the respective aperture.
15. The method as claimed in claim 1 , wherein at least one of the openings of the first or second subset has a void located therein and is devoid of the first and second conductive interconnects.
16. The method as claimed in claim 1 , wherein at least one of the openings of the first or second subset has a void located therein, and the at least one of the openings having the void located therein is partially filled with an insulating dielectric material.
17. The method as claimed in claim 1 , wherein the pluralities of first and second conductive interconnects have portions directly contacting semiconductor material of the substrate.
18. A method of fabricating a microelectronic unit, comprising:
forming a plurality of openings extending from a first surface of a semiconductor substrate towards a second surface remote therefrom, the openings arranged in a symmetric or asymmetric distribution across an area of the first surface, with at least m openings spaced apart in a first direction along the first surface and n openings spaced apart in a second direction along the first surface transverse to the first direction, each of m and n being greater than 1, the substrate embodying a plurality of active semiconductor devices, the substrate having a plurality of conductive pads exposed at the second surface;
forming pluralities of first and second conductive interconnects extending within respective first and second subsets of the openings;
forming first and second conductive vias electrically connected with respective first and second pads of the plurality of conductive pads, each first conductive interconnect being electrically connected to the first conductive via, each second conductive interconnect being electrically connected to the second conductive via;
forming first and second conductive contacts exposed for interconnection with an external element, the first and second conductive contacts being electrically connected to the first and second conductive interconnects, respectively, the first and second subsets of the openings underlying the respective first and second conductive contacts; and
depositing an insulating dielectric material at least partially filling a third subset of the of openings, wherein the plurality of first conductive interconnects is separated from the plurality of second conductive interconnects in a horizontal direction substantially parallel to the first surface by at least one of the third subset of the openings,
wherein at least some of the third subset of the openings do not underlie the first or second conductive contacts.
19. The method as claimed in claim 18 , wherein the at least some of the third subset of the openings are disposed between the plurality of first conductive interconnects and the plurality of second conductive interconnects in the horizontal direction.
20. The method as claimed in claim 18 , wherein each conductive interconnect includes a portion extending in a vertical direction substantially perpendicular to the first surface, the plurality of first conductive interconnects being separated from one another in a horizontal direction substantially parallel to the first surface by material of the semiconductor substrate.
21. The method as claimed in claim 18 , further comprising forming first and second apertures extending through the respective first and second pads by processing applied to the pads from above the second surface.
22. The method as claimed in claim 21 , wherein the first and second conductive vias are formed within the respective first and second apertures and extending through the respective first and second pads.