Semiconductor device with voids within silicon-on-insulator (SOI) structure and method of forming the semiconductor device
View Patent ↗A semiconductor device with voids within a silicon-on-insulator (SOI) structure and a method of forming the semiconductor device are provided. Voids are formed within a Buried Oxide layer (BOX layer) of the silicon-on-insulator (SOI) semiconductor to enhance a performance index of an RF-SOI switch. The semiconductor device with voids within a silicon-on-insulator (SOI) structure includes a semiconductor substrate; an insulating layer disposed on the substrate; a silicon-on-insulator (SOI) layer disposed on the insulating layer; a device isolation layer and an active area disposed within the SOI layer; one or more voids disposed within the insulating layer; and a sealing insulating sealing an opening of the void.
1. A semiconductor device with voids within a silicon-on-insulator (SOI) structure comprising:
a semiconductor substrate;
an insulating layer disposed on the substrate;
a silicon-on-insulator (SOI) layer disposed on the insulating layer;
a device isolation layer and an active area disposed within the SOI layer;
a void disposed within the insulating layer; and
a sealing insulating layer or film sealing an opening of the void.
2. The semiconductor device of claim 1 , further comprising another insulating layer disposed on a surface of the void.
3. The semiconductor device of claim 2 , wherein at least a part of a drain region, a source region, or a channel region of the active area is formed above an upper region of the void.
4. The semiconductor device of claim 1 , further comprising a void protection layer disposed along sidewalls of the void.
5. The semiconductor device of claim 1 , further comprising a protection layer disposed along sidewalls of the device isolation layer.
6. The semiconductor device of claim 1 , comprising a protection layer and another insulating layer disposed between the device isolation layer and the void.
7. The semiconductor device of claim 1 , wherein the semiconductor device comprises at least one of a CMOS(Complementary Metal-Oxide Semiconductor), an NMOS(N-type Metal-Oxide Semiconductor), a PMOS(P-type Metal-Oxide Semiconductor), an LDMOS(Laterally Diffused Metal-Oxide Semiconductor), a BJT(Bipolar Junction Transistor), a Diode, a Schottky diode, GaAs, InP, and GaN-based devices such as MESFETs, HEMTs, pHEMTs, MIS-HEMTs, or MOSFETs.
8. The semiconductor device of claim 1 , wherein the void is filled with pure nitrogen or under vacuum.
9. The semiconductor device of claim 1 , wherein a length of the void is longer than a length of the opening.
10. The semiconductor device of claim 1 , wherein the void has a horizontal type shape or alignment parallel to a top surface of the substrate.
11. The semiconductor device of claim 1 , wherein the void has a larger width in a horizontal direction than a vertical height of the insulating layer.