Multiple contact probes
View Patent ↗The present invention is a probe array for testing an electrical device under test comprising one or more ground/power probes and one or more signal probes and optionally a gas flow apparatus.
1. A probe array for probing a device under test having a plurality of contact pads comprising:
at least one power/ground probe wherein said power/ground probe comprises at least two skates;
at least one signal probe;
said power/ground probe comprising a width that is greater than a width of said signal probe.
2. The probe array of claim 1 wherein said power/ground probe comprises a sacrificial substrate.
3. The probe array of claim 2 wherein said sacrificial substrate is disposed on a tip of said power/ground probe.
4. The probe array of claim 2 wherein said sacrificial substrate does not make contact with a contact pad.
5. The probe array of claim 2 wherein said sacrificial substrate makes contact with a contact pad.
6. The probe array of claim 1 wherein a first skate contacts a first power/ground IC pad and a second skate contacts a second power/ground IC pad.
7. The probe array of claim 1 wherein said skates contact a same IC pad.
8. The probe array of claim 1 wherein a sacrificial substrate is disposed between said at least two skates.
9. The probe array of claim 1 wherein said width of said power/ground probe is a multiple of said width of said signal probe.
10. The probe array of claim 1 wherein said power/ground probe comprises one or more attachment points for connecting to a space transformer pad.