Compositions comprising sulfonamide material and processes for photolithography
View Patent ↗New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that have sulfonamide substitution. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
1. A method for processing a photoresist composition, comprising:
(a) applying on a substrate a photoresist composition to form a photoresist layer, wherein the photoresist composition comprises:
(i) one or more resins,
(ii) a photoactive component, and
(iii) one or more polymers that comprise:
1) a group of the formula RS(═O) 2 (X)NR′ 2 where X is a 1 to 8 carbon linkage, R is a non-hydrogen substituent, and each R′ is independently a hydrogen or non-hydrogen substituent, and
2) one or more photoacid-labile groups wherein the iii) one or more polymers are different from the one or more resins; and
(b) immersion exposing the photoresist layer to radiation activating for the photoresist composition.
2. The method of claim 1 wherein the iii) one or more polymers comprise one or more electron-withdrawing moieties.
3. The method of claim 1 wherein the iii) one or more polymers comprise one more fluorine atoms or fluorine-substituted groups.
4. A photoresist composition comprising:
(i) one or more resins,
(ii) a photoactive component in an amount sufficient to create a latent image in a coating layer of the photoresist composition upon exposure to activating radiation, and
(iii) one or more polymers that comprise a group of the formula RS(═O) 2 (X)NR′ 2 where X is a 1 to 8 carbon linkage, R is a non-hydrogen substituent, and each R′ is independently a hydrogen or non-hydrogen substituent, and the one or more polymers comprise one or more photoacid-labile groups,
wherein the (iii) one or more polymers are distinct from the one or more resins.
5. The photoresist composition of claim 4 wherein the one or more polymers comprise aqueous base-solubilizing groups other than the group of formula RS(═O) 2 (X)NR′ 2 .
6. The photoresist composition of claim 4 wherein the photoresist composition comprises a tetrapolymer that comprises a group of the formula RS(═O) 2 (X)NR′ 2 .
7. The photoresist composition of claim 4 wherein the photoresist composition comprises a pentapolymer that comprises a group of the formula RS(═O) 2 (X)NR′ 2 .
8. The photoresist composition of claim 4 wherein the photoresist composition comprises a terpolymer that comprises a group of the formula RS(═O) 2 (X)NR′ 2 .
9. A photoresist composition comprising:
(i) one or more resins,
(ii) a photoactive component in an amount sufficient to create a latent image in a coating layer of the photoresist composition upon exposure to activating radiation, and
(iii) one or more tetrapolymers, pentapolymers and/or terpolymers that comprise a comprise a group of the formula RS(═O) 2 (X)NR′ 2 where X is a 1 to 8 carbon linkage, R is a non-hydrogen substituent, and each R′ is independently a hydrogen or non-hydrogen substituent,
wherein the (iii) one or more polymers are distinct from the one or more resins.
10. The photoresist composition of claim 9 wherein the photoresist composition comprises a tetrapolymer that comprises a group of the formula RS(═O) 2 (X)NR′ 2 .
11. The photoresist composition of claim 9 wherein the photoresist composition comprises a pentapolymer that comprises a group of the formula RS(═O) 2 (X)NR′ 2 .
12. The photoresist composition of claim 9 wherein the photoresist composition comprises a terpolymer that comprises a group of the formula RS(═O) 2 (X)NR′ 2 .