Manufacturing method of semiconductor device and semiconductor device thereof
View Patent ↗A semiconductor device structure and a method for manufacturing a semiconductor device. As a non-limiting example, various aspects of this disclosure provide a method for manufacturing a semiconductor device that comprises ordering and performing processing steps in a manner that prevents warpage deformation from occurring to a wafer and/or die due to mismatching thermal coefficients.
1. A method of manufacturing a semiconductor device, the method comprising:
forming contact structures on a first surface of an interposer, where the interposer is on a surface of a substrate;
coupling a wafer support system (WSS) on the first surface of the interposer and the contact structures;
removing the substrate;
coupling a semiconductor die to a second surface of the interposer opposite to the first surface of the interposer;
encapsulating the second surface of the interposer and the semiconductor die with an encapsulant; and
removing the WSS.
2. The method of claim 1 , comprising prior to said removing the WSS, thinning the encapsulant to expose the semiconductor die.
3. The method of claim 1 , comprising after said encapsulating, forming a stiffener on at least the encapsulant.
4. The method of claim 3 , wherein said forming a stiffener comprises forming the stiffener directly on at least the encapsulant without an intervening adhesive layer.
5. The method of claim 3 , wherein said forming a stiffener comprises forming a multi-layer multi-material stiffener structure directly on at least the encapsulant.
6. The method of claim 1 , comprising forming the interposer by, at least in part:
forming a dielectric layer comprising openings to the substrate; and
forming a conductive layer in the openings to the substrate.
7. The method of claim 1 , wherein the substrate comprises silicon and/or glass.
8. The method of claim 1 , comprising:
prior to said encapsulating and prior to said coupling a WSS, first encapsulating the first surface of the interposer and the contact structures using a first encapsulant, and
wherein said coupling a WSS on the first surface of the interposer and the contact structures comprises coupling the WSS on the first encapsulant and the contact structures.
9. The method of claim 8 , wherein said first encapsulating comprises forming the first encapsulant to have a thickness that is less than a radius of the contact structures.
10. The method of claim 8 , wherein said first encapsulating comprises forming the first encapsulant to have a thickness that is less than a thickness of the encapsulant.
11. A method of manufacturing a semiconductor device, the method comprising:
coupling a first wafer support system (WSS) on a first surface of a first interposer, where the first interposer is on a surface of a substrate;
removing the substrate;
forming a second interposer comprising a redistribution layer and a dielectric layer on a second surface of the first interposer opposite to the first surface of the first interposer;
coupling a second WSS on a first surface of the second interposer;
removing the first WSS;
coupling a semiconductor die on the first surface of the first interposer;
encapsulating the first surface of the first interposer and the semiconductor die using an encapsulant; and
removing the second WSS.
12. The method of claim 11 , comprising prior to said removing the second WSS, thinning the encapsulant to expose the semiconductor die.
13. The method of claim 11 , comprising after said removing the second WSS, attaching contact structures on the first surface of the second interposer.
14. The method of claim 11 , comprising:
prior to said encapsulating, forming a conductive pillar between the semiconductor die and a second semiconductor die that is coupled on the first surface of the first interposer adjacent to the semiconductor die, and
wherein said encapsulating comprises encapsulating the conductive pillar using the encapsulant.
15. The method of claim 14 , comprising thinning the encapsulant to expose at least the end of the conductive pillar.
16. A method of manufacturing a semiconductor device, the method comprising:
forming a second interposer on a first interposer, where the second interposer comprises a second redistribution layer and a second dielectric layer;
attaching a die to the first interposer;
removing a substrate on which the first interposer was formed;
encapsulating the die with encapsulant; and
forming a stiffener directly on a surface of the semiconductor device without an intervening layer of adhesive.
17. The method of claim 16 , wherein said forming a stiffener comprises forming the stiffener directly on the second interposer without the intervening layer of adhesive.
18. The method of claim 16 , wherein said removing the substrate comprises removing a silicon or glass substrate on which the first interposer was fabricated.
19. The method of claim 16 , wherein said integrally forming a stiffener comprises forming the stiffener directly on the encapsulant without the intervening layer of adhesive.
20. The method of claim 16 , wherein:
the first interposer comprises a BEOL redistribution layer; and
the second interposer comprises a post-FAB redistribution layer.