Back-end transistors with highly doped low-temperature contacts
A back end of line device and method for fabricating a transistor device include a substrate having an insulating layer formed thereon and a channel layer formed on the insulating layer. A gate structure is formed on the channel layer. Dopants are implanted into an upper portion of the channel layer on opposite sides of the gate structure to form shallow source and drain regions using a low temperature implantation process. An epitaxial layer is selectively grown on the shallow source and drain regions to form raised regions above the channel layer and against the gate structure using a low temperature plasma enhanced chemical vapor deposition process, wherein low temperature is less than about 400 degrees Celsius.
1. A method for fabricating a transistor device, comprising:
providing a substrate having an insulating layer formed thereon and a channel layer formed on the insulating layer;
forming a gate structure on the channel layer;
growing a doped epitaxial layer selectively onto exposed portions of the channel layer adjacent to the gate structure using a low temperature plasma enhanced chemical vapor deposition process, wherein low temperature is less than about 400 degrees Celsius; and
driving dopants into an upper portion of the channel layer below the epitaxial layer on opposite sides of the gate structure to form shallow source and drain regions using an anneal process at the low temperature,
wherein the shallow source and drain regions do not extend to the insulating layer.
2. The method as recited in claim 1 , wherein the channel layer includes a crystalline form of one of Si, Ge and a III-V material and wherein the crystalline form of the channel layer is single-crystalline or polycrystalline.
3. The method as recited in claim 1 , wherein growing a doped epitaxial layer includes forming openings in a dielectric layer formed over the channel layer and depositing the epitaxial layer in the openings.
4. The method as recited in claim 1 , wherein growing a doped epitaxial layer includes growing the doped epitaxial layer on sides of the gate structure to form contacts to the shallow source and drain regions.
5. The method as recited in claim 1 , wherein the low temperature plasma enhanced chemical vapor deposition process includes a dilution gas and a source gas with a gas ratio of dilution gas to source gas of between 0 to about 1000 at about 150 degrees C.
6. The method as recited in claim 1 , wherein growing a doped epitaxial layer selectively includes forming raised source and drain regions above the channel layer at a temperature of between about 150 to about 250 degrees Celsius.
7. The method as recited in claim 1 , wherein the transistor is a back-end-of-line (BEOL) transistor formed on the insulating layer, which is a BEOL insulating layer.