Printable inorganic semiconductor structures
View Patent ↗The present invention provides structures and methods that enable the construction of micro-LED chiplets formed on a sapphire substrate that can be micro-transfer printed. Such printed structures enable low-cost, high-performance arrays of electrically connected micro-LEDs useful, for example, in display systems. Furthermore, in an embodiment, the electrical contacts for printed LEDs are electrically interconnected in a single set of process steps. In certain embodiments, formation of the printable micro devices begins while the semiconductor structure remains on a substrate. After partially forming the printable micro devices, a handle substrate is attached to the system opposite the substrate such that the system is secured to the handle substrate. The substrate may then be removed and formation of the semiconductor structures is completed. Upon completion, the printable micro devices may be micro transfer printed to a destination substrate.
1. A method of making an inorganic semiconductor structure suitable for micro-transfer printing, comprising:
providing a source substrate;
forming a semiconductor layer on the source substrate, wherein the semiconductor layer has a first side and a second side opposite the first side and adjacent to the substrate;
forming a first electrical contact on the first side of the semiconductor layer opposite the source substrate;
removing a portion of the semiconductor layer surrounding the first electrical contact to form a trench surrounding a semiconductor element made from the semiconductor layer, the semiconductor element having a substrate side in contact with the source substrate and a handle side opposite the substrate side;
providing a sacrificial layer covering the first electrical contact and covering at least a portion of the handle side of the semiconductor element and filling a portion of the trench;
providing an interlayer over the sacrificial layer, the interlayer having different chemical selectivity than the sacrificial layer, wherein a portion of the interlayer contacts the source substrate at the base of the trench to form an anchor;
adhering the interlayer to a handle substrate;
removing the source substrate to expose the substrate side of the semiconductor element;
forming a second electrical contact on the exposed substrate side of the semiconductor element;
forming a tether bridging the exposed substrate side of the semiconductor element to the anchor; and
removing the sacrificial layer, thereby forming a printable semiconductor structure partially released from the handle substrate and physically secured to the anchor by the tether.
2. The method of claim 1 , wherein the handle substrate is a glass, metal, or plastic.
3. The method of claim 1 , wherein the source substrate is a sapphire substrate.
4. The method of claim 1 , wherein the semiconductor layer comprises GaN and/or doped GaN.
5. The method of claim 1 , wherein adhering the interlayer to a handle substrate comprises providing an adhesive layer on the interlayer and adhering the handle substrate to the adhesion layer.
6. The method of claim 1 , wherein the trench extends through the semiconductor layer to the source substrate.
7. The method of claim 1 , wherein the trench extends partially into the semiconductor layer such that a portion of the semiconductor layer forms an ablation layer between the semiconductor element and the source substrate.
8. The method of claim 1 , wherein the semiconductor element, the first electrical contact, and the second electrical contact form a diode, a laser, or a light-emitting diode.
9. A method of making an inorganic semiconductor structure suitable for micro-transfer printing, comprising:
providing a source substrate;
forming a semiconductor layer on the source substrate, wherein the semiconductor layer has a first side and a second side opposite the first side and adjacent to the substrate;
removing a portion of the semiconductor layer to form a trench surrounding a semiconductor element made from the semiconductor layer, the semiconductor element having a substrate side in contact with the source substrate and a handle side opposite the substrate side;
providing a sacrificial layer covering at least a portion of the handle side of the semiconductor element and filling a portion of the trench;
providing an interlayer over the sacrificial layer, the interlayer having different chemical selectivity than the sacrificial layer, wherein a portion of the interlayer contacts the source substrate at the base of the trench to form an anchor;
adhering the interlayer to a handle substrate;
removing the source substrate to expose the substrate side of the semiconductor element;
removing a portion of the semiconductor element to form a cantilever extension of the semiconductor element;
forming a first electrical contact on the cantilever extension;
forming a second electrical contact on the exposed substrate side of the semiconductor element; and
removing the sacrificial layer, thereby forming a printable semiconductor structure partially released from the handle substrate.
10. The method of making an inorganic semiconductor structure suitable for micro-transfer printing, comprising:
providing a source substrate;
forming a semiconductor layer on the source substrate, wherein the semiconductor layer has a first side and a second side opposite the first side and adjacent to the substrate;
forming a first electrical contact on the first side of the semiconductor layer opposite the source substrate;
removing a portion of the semiconductor layer surrounding the first electrical contact to form a trench surrounding a semiconductor element made from the semiconductor layer, the semiconductor element having a substrate side in contact with the source substrate and a handle side opposite the substrate side;
providing a sacrificial layer covering the first electrical contact and covering at least a portion of the handle side of the semiconductor element and filling a portion of the trench;
providing an interlayer over the sacrificial layer, the interlayer having different chemical selectivity than the sacrificial layer, wherein a portion of the interlayer contacts the source substrate at the base of the trench to form an anchor;
adhering the interlayer to a handle substrate;
removing the source substrate to expose the substrate side of the semiconductor element; and
forming a second electrical contact on the exposed substrate side of the semiconductor element, wherein the interlayer has a thermal conductivity greater than or equal to 1 W/mK.
11. An inorganic semiconductor structure comprising:
a source substrate;
a semiconductor element surrounded by a trench, the semiconductor element having a substrate side in contact with the source substrate and a handle side opposite the substrate side;
a first metal contact in electrical contact with the semiconductor element on the handle side;
a second metal contact in electrical contact with the semiconductor element on the substrate side;
a sacrificial layer covering at least a portion of the semiconductor element and covering the first metal contact and filling a portion of the trench;
an interlayer formed over the sacrificial layer, wherein a portion of the interlayer contacts the source substrate at a base of the trench to form an anchor;
a handle substrate adhered to the interlayer, wherein at least a portion of the interlayer is between the handle substrate and the sacrificial layer; and
a tether bridging the substrate side of the semiconductor element to the anchor.
12. The structure of claim 11 , wherein the handle substrate is a glass, metal, or plastic.
13. The structure of claim 11 , wherein the source substrate is a sapphire substrate.
14. The structure of claim 11 , wherein the trench extends partially into the semiconductor layer such that a portion of the semiconductor layer forms an ablation layer between the semiconductor element and the source substrate.
15. The structure of claim 11 , wherein a portion of the interlayer is in contact with a portion of the semiconductor element and forms the tether.
16. The structure of claim 11 , wherein the interlayer is adhesive and the handle substrate is adhered directly to the interlayer.
17. The structure of claim 11 , wherein the interlayer has a thermal conductivity greater than or equal to 1 W/mK.
18. The structure of claim 11 , wherein the semiconductor element, the first electrical contact, and the second electrical contact form a diode, a laser, or a light-emitting diode.