Perpendicular magnetic anisotropy free layers with iron insertion and oxide interfaces for spin transfer torque magnetic random access memory
View Patent ↗A method of making a spin-torque transfer magnetic random access memory device (STT MRAM) device includes forming a tunnel barrier layer on a reference layer; forming a free layer on the tunnel barrier layer, the free layer comprising a cobalt iron boron (CoFeB) alloy layer and an iron (Fe) layer; and performing a sputtering process to form a metal oxide layer on the Fe layer.
1. A method of making a STT MRAM device, the method comprising:
forming a tunnel barrier layer on a reference layer;
forming a free layer on the tunnel barrier layer, the free layer comprising a magnetic layer, a CoFeB alloy layer, a spacer layer between the magnetic layer and the CoFeB alloy layer, and an Fe layer on the CoFeB alloy layer; and
performing a sputtering process to form a metal oxide layer on the free layer.
2. The method of claim 1 , wherein the CoFeB alloy layer comprises boron (B) in an amount in a range from about 20 to about 30 at. %.
3. The method of claim 1 , wherein the CoFeB alloy layer comprises Fe in an amount in a range from about 20 to about 60 at. %.
4. The method of claim 1 , wherein the CoFeB alloy layer comprises cobalt (Co) in an amount in a range from about 20 to about 40 at. %.
5. The method of claim 1 , wherein the sputtering process is RF sputtering.
6. The method of claim 5 , wherein the RF sputtering comprises sputtering a metal oxide onto the CoFeB alloy layer.
7. The method of claim 6 , wherein the metal oxide is MgO, tantalum oxide (TaOx), titanium oxide (TiOx), aluminum oxide (AlOx), magnesium titanium oxide (MgTiOx), or any combination thereof.
8. A method of making a STT MRAM device, the method comprising:
forming a tunnel barrier layer on a reference layer;
forming a free layer on the tunnel barrier layer, the free layer comprising a magnetic layer, a CoFeB alloy layer, a spacer layer between the magnetic layer and the CoFeB alloy layers, and an Fe layer disposed on the CoFeB alloy layer; and
performing a sputtering process to form a metal oxide layer on the free layer;
wherein sputtering process comprises RF sputtering a metal oxide onto the Fe layer under a pressure in a range from about 0.1 to about 10 milli-Torr (mTorr).
9. The method of claim 8 , wherein the Fe layer comprises at least 99 at. % Fe.
10. The method of claim 8 , wherein the free layer has a thickness in a range from about 0.6 to about 6 nm.
11. The method of claim 8 , wherein the metal oxide layer has a thickness in a range from about 0.2 to about 2 nm.
12. The method of claim 8 , wherein the sputtering process further comprises depositing the metal oxide at a deposition rate in a range from about 0.0005 nm/second to 0.005 nm/second.