IP Library Granted Patent US 10,008,472
Granted Patent B2
US 10,008,472 · App. 14/753,365 · Granted Jun 26, 2018

Method for making semiconductor device with sidewall recess and related devices

Inventor: Jefferson Talledo (Calamba, PH)
Assignee: STMICROELECTRONICS, INC.
H01L24/85H01L21/4842H01L21/561H01L21/78H01L23/3121H01L23/49544H01L24/97H01L23/49503H01L23/49582H01L2224/32245H01L2224/45124H01L2224/45139H01L2224/45144H01L2224/45147H01L2224/48091H01L2224/48247H01L2224/73265H01L2224/97H01L2924/181
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Quick Facts
Patent No.
US 10,008,472
App. No.
14/753,365
Granted
Jun 26, 2018
Kind
B2
Abstract

A method is for making a semiconductor device. The method may include providing a lead frame having a recess, forming a sacrificial material in the recess of the lead frame, and mounting an IC on the lead frame. The method may include encapsulating the IC and the lead frame, removing portions of the lead frame to define lead frame contacts for the IC, and removing the sacrificial material to define for each lead frame contact a solder anchoring tab extending outwardly at a lower region and defining a sidewall recess between opposing portions of the solder anchoring tab and the encapsulation material.

Claims (41)

1. A method for making a semiconductor device comprising:

providing a lead frame having a recess therein;

forming a sacrificial material in the recess of the lead frame, the sacrificial material having a top surface and an opposite bottom surface, after forming the sacrificial material, the top surface of the sacrificial material being coplanar with a top surface of the lead frame and the bottom surface of the sacrificial material contacting a bottom surface of the recess in the lead frame;

mounting an integrated circuit (IC) on the lead frame;

encapsulating the IC and the lead frame with an encapsulation material, the encapsulation material being different from the sacrificial material;

removing portions of the lead frame to define a plurality of lead frame contacts for the IC; and

removing the sacrificial material to define for each lead frame contact a solder anchoring tab extending outwardly at a lower region thereof and defining a sidewall recess between opposing portions of the solder anchoring tab and the encapsulation material.

2. The method of claim 1 wherein removing portions of the lead frame comprises singulating the IC by dicing the lead frame at the recess.

3. The method of claim 1 wherein the sacrificial material comprises at least one of a thermally decomposable material, a water soluble material, and a photosensitive material.

4. The method of claim 1 wherein the sacrificial material comprises a polymer.

5. The method of claim 1 further comprising forming a plurality of bond wires, each bond wire coupling a respective lead frame contact with the IC.

6. The method of claim 1 further comprising forming a plating layer on the solder anchoring tab.

7. The method of claim 1 wherein each lead frame contact comprises a mold anchoring tab extending inwardly from an upper region thereof.

8. The method of claim 7 wherein encapsulating comprises forming the encapsulation material to surround the mold anchoring tab.

9. The method of claim 1 wherein the lead frame defines an IC die pad having a plurality of mold anchoring tabs extending outwardly from an upper region thereof.

10. A method for making a semiconductor device comprising:

providing a lead frame having a recess therein;

forming a thermally decomposable sacrificial material in the recess of the lead frame, the thermally decomposable sacrificial material having a top surface and an opposite bottom surface, after forming the thermally decomposable sacrificial material, the top surface of the thermally decomposable sacrificial material being coplanar with a top surface of the lead frame and the bottom surface of the thermally decomposable sacrificial material contacting a bottom surface of the recess in the lead frame;

mounting an integrated circuit (IC) on the lead frame;

encapsulating the IC and the lead frame with an encapsulation material, the encapsulation material being different from the thermally decomposable sacrificial material;

removing portions of the lead frame to define a plurality of lead frame contacts for the IC, each lead frame contact comprising a mold anchoring tab extending inwardly from an upper region thereof; and

removing the thermally decomposable sacrificial material to define for each lead frame contact a solder anchoring tab extending outwardly at a lower region thereof and defining a sidewall recess between opposing portions of the solder anchoring tab and the encapsulation material.

11. The method of claim 10 wherein removing portions of the lead frame comprises singulating the IC by dicing the lead frame at the recess.

12. The method of claim 10 wherein the thermally decomposable sacrificial material comprises a polymer.

13. The method of claim 10 further comprising forming a plurality of bond wires, each bond wire coupling a respective lead frame contact with the IC.

14. The method of claim 10 further comprising forming a plating layer on the solder anchoring tab.

15. The method of claim 10 wherein encapsulating comprises forming the encapsulation material to surround the mold anchoring tab.

16. The method of claim 10 wherein the lead frame defines an IC die pad having a plurality of mold anchoring tabs extending outwardly from an upper region thereof.

17. A method for making a semiconductor device comprising:

providing a lead frame having a recess therein;

forming a water soluble sacrificial material in the recess of the lead frame, the water soluble sacrificial material having a top surface and an opposite bottom surface, after forming the water soluble sacrificial material, the top surface of the water soluble sacrificial material being coplanar with a top surface of the lead frame and the bottom surface of the water soluble sacrificial material contacting a bottom surface of the recess in the lead frame;

mounting an integrated circuit (IC) on the lead frame;

encapsulating the IC and the lead frame with an encapsulation material, the encapsulation material being different from the water soluble sacrificial material;

removing portions of the lead frame to define a plurality of lead frame contacts for the IC, each lead frame contact comprising a mold anchoring tab extending inwardly from an upper region thereof; and

removing the water soluble sacrificial material to define for each lead frame contact a solder anchoring tab extending outwardly at a lower region thereof and defining a sidewall recess between opposing portions of the solder anchoring tab and the encapsulation material.

18. The method of claim 17 wherein removing portions of the lead frame comprises singulating the IC by dicing the lead frame at the recess.

19. The method of claim 17 wherein the water soluble sacrificial material comprises a polymer.

20. The method of claim 17 further comprising forming a plurality of bond wires, each bond wire coupling a respective lead frame contact with the IC.

21. The method of claim 17 further comprising forming a plating layer on the solder anchoring tab.

22. The method of claim 17 wherein encapsulating comprises forming the encapsulation material to surround the mold anchoring tab.

23. The method of claim 17 wherein the lead frame defines an IC die pad having a plurality of mold anchoring tabs extending outwardly from an upper region thereof.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 18, 2024
From: STMICROELECTRONICS, INC.
To: STMICROELECTRONICS INTERNATIONAL N.V.
Reel/Frame 068025/0112 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 2, 2015
From: TALLEDO, JEFFERSON
To: STMICROELECTRONICS, INC.
Reel/Frame 036473/0840 →
Continuity (1)
Related Publication 20160379916A1 · Dec 29, 2016