Inhibiting propagation of surface cracks in a MEMS device
View Patent ↗A microelectromechanical systems (MEMS) device includes a structural layer having a top surface. The top surface includes surface regions that are generally parallel to one another but are offset relative to one another such that a stress concentration location is formed between them. Laterally propagating shallow surface cracks have a tendency to form in the structural layer, especially near the joints between the surface regions. A method entails fabricating the MEMS device and forming trenchesin the top surface of the structural layer of the MEMS device. The trenches act as a crack inhibition feature to largely prevent the formation of deep cracks in structural layer which might otherwise result in MEMS device failure.
1. A microelectromechanical systems (MEMS) device comprising:
a structural layer having a surface, said surface including a first surface region and a second surface region adjacent to said first surface region, said first surface region lying in a first plane that is offset from a second plane of said second surface region, said second plane being substantially parallel to said first plane, and said surface including a longitudinal joint between said first and second surface regions; and
at least one trench formed in said surface of said structural layer extending across said longitudinal joint.
2. The MEMS device of claim 1 wherein said surface includes at least one stress concentration location, and said at least one stress concentration location includes said longitudinal joint.
3. The MEMS device of claim 1 wherein said at least one trench extends into each of said first and second surface regions.
4. The MEMS device of claim 1 wherein said at least one trench exhibits a length and a width, said length being greater than said width, and said length of said at least one trench is oriented approximately perpendicular to said longitudinal joint.
5. The MEMS device of claim 1 wherein said longitudinal joint is a first longitudinal joint, and said MEMS device comprises:
a second longitudinal joint between said first and second surface regions, said second longitudinal joint being contiguous with said first longitudinal joint, and said second longitudinal joint being in nonparallel alignment with said first longitudinal joint section; and
said at least one trench includes a first trench extending across said first longitudinal joint and a second trench extending across said second longitudinal joint, said second trench being in said nonparallel alignment with said first trench.
6. The MEMS device of claim 5 wherein:
said first trench is oriented approximately perpendicular to said first longitudinal joint; and
said second trench is oriented approximately perpendicular to said second longitudinal joint.
7. The MEMS device of claim 5 wherein said first and second trenches form a contiguous extended trench.
8. The MEMS device of claim 1 wherein said at least one trench extends into said surface by a depth, said depth being in a range of 0.25 to 0.75 microns.
9. The MEMS device of claim 1 wherein said at least one trench exhibits a length and a width, said length being greater than said width, and said length being in a range of three to seven microns.
10. The MEMS device of claim 1 wherein said at least one trench exhibits a length and a width, said length being greater than said width, and said width being in a range of three to five microns.
11. The MEMS device of claim 1 wherein a plurality of trenches extend across said longitudinal joint.
12. The MEMS device of claim 11 wherein said trenches of said plurality of trenches are oriented approximately parallel to one another.
13. The MEMS device of claim 11 wherein adjacent trenches of said plurality of trenches are separated from one another by a spacing, said spacing being in a range of three to five microns.
14. The MEMS device of claim 1 wherein said structural layer is a polysilicon layer.
15. A microelectromechanical systems (MEMS) device comprising:
a structural layer having a surface, said surface including a first surface region and a second surface region adjacent to said first surface region, said first surface region lying in a first plane that is offset from a second plane of said second surface region, said second plane being substantially parallel to said first plane; and
a plurality of trenches formed in said surface of said structural layer extending across a longitudinal joint between said first and second surface regions, wherein each trench of said plurality of trenches exhibits a length and a width, said length being greater than said width, said length being oriented approximately perpendicular to said longitudinal joint, and said trenches extend into each of said first and second surface regions.
16. The MEMS device of claim 15 wherein said length is in a range of three to seven microns.
17. The MEMS device of claim 15 wherein said each trench of said plurality of trenches extends into said first and second surface regions by a depth, said depth being in a range of 0.25 to 0.75 microns.
18. The MEMS device of claim 15 wherein said trenches of said plurality of trenches are oriented approximately parallel to one another.
19. A microelectromechanical systems (MEMS) device comprising:
a polysilicon structural layer having a surface, said surface including a first surface region and a second surface region adjacent to said first surface region, said first surface region lying in a first plane that is offset from a second plane of said second surface region, said second plane being substantially parallel to said first plane; and
a plurality of trenches formed in said surface of said polysilicon structural layer across a longitudinal joint between said first and second surface regions, each of said trenches of said plurality of trenches extending into said first and second surface regions by a depth.
20. The MEMS device of claim 19 wherein said depth is in a range of 0.25 to 0.75 microns.